JPH11339726A5 - - Google Patents

Info

Publication number
JPH11339726A5
JPH11339726A5 JP1998145598A JP14559898A JPH11339726A5 JP H11339726 A5 JPH11339726 A5 JP H11339726A5 JP 1998145598 A JP1998145598 A JP 1998145598A JP 14559898 A JP14559898 A JP 14559898A JP H11339726 A5 JPH11339726 A5 JP H11339726A5
Authority
JP
Japan
Prior art keywords
magnetic field
source device
light source
generating means
field generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998145598A
Other languages
English (en)
Japanese (ja)
Other versions
JP4091166B2 (ja
JPH11339726A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP14559898A priority Critical patent/JP4091166B2/ja
Priority claimed from JP14559898A external-priority patent/JP4091166B2/ja
Publication of JPH11339726A publication Critical patent/JPH11339726A/ja
Publication of JPH11339726A5 publication Critical patent/JPH11339726A5/ja
Application granted granted Critical
Publication of JP4091166B2 publication Critical patent/JP4091166B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14559898A 1998-05-27 1998-05-27 光源装置 Expired - Lifetime JP4091166B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14559898A JP4091166B2 (ja) 1998-05-27 1998-05-27 光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14559898A JP4091166B2 (ja) 1998-05-27 1998-05-27 光源装置

Publications (3)

Publication Number Publication Date
JPH11339726A JPH11339726A (ja) 1999-12-10
JPH11339726A5 true JPH11339726A5 (fr) 2005-09-22
JP4091166B2 JP4091166B2 (ja) 2008-05-28

Family

ID=15388774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14559898A Expired - Lifetime JP4091166B2 (ja) 1998-05-27 1998-05-27 光源装置

Country Status (1)

Country Link
JP (1) JP4091166B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4681940B2 (ja) * 2005-05-25 2011-05-11 Ｈｏｙａ株式会社 内視鏡用光源装置
US7838853B2 (en) * 2006-12-14 2010-11-23 Asml Netherlands B.V. Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
DE102009059705A1 (de) * 2009-12-18 2011-06-22 Sick Maihak GmbH, 79183 Gasentladungslampe

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