JPH1150249A5 - - Google Patents

Info

Publication number
JPH1150249A5
JPH1150249A5 JP1997205107A JP20510797A JPH1150249A5 JP H1150249 A5 JPH1150249 A5 JP H1150249A5 JP 1997205107 A JP1997205107 A JP 1997205107A JP 20510797 A JP20510797 A JP 20510797A JP H1150249 A5 JPH1150249 A5 JP H1150249A5
Authority
JP
Japan
Prior art keywords
magnet
holes
hole
holder
pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997205107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1150249A (ja
JP4043077B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP20510797A priority Critical patent/JP4043077B2/ja
Priority claimed from JP20510797A external-priority patent/JP4043077B2/ja
Publication of JPH1150249A publication Critical patent/JPH1150249A/ja
Publication of JPH1150249A5 publication Critical patent/JPH1150249A5/ja
Application granted granted Critical
Publication of JP4043077B2 publication Critical patent/JP4043077B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP20510797A 1997-07-31 1997-07-31 マグネトロンスパッタ装置およびそれに使用するマグネットユニット Expired - Lifetime JP4043077B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20510797A JP4043077B2 (ja) 1997-07-31 1997-07-31 マグネトロンスパッタ装置およびそれに使用するマグネットユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20510797A JP4043077B2 (ja) 1997-07-31 1997-07-31 マグネトロンスパッタ装置およびそれに使用するマグネットユニット

Publications (3)

Publication Number Publication Date
JPH1150249A JPH1150249A (ja) 1999-02-23
JPH1150249A5 true JPH1150249A5 (pl) 2005-05-26
JP4043077B2 JP4043077B2 (ja) 2008-02-06

Family

ID=16501544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20510797A Expired - Lifetime JP4043077B2 (ja) 1997-07-31 1997-07-31 マグネトロンスパッタ装置およびそれに使用するマグネットユニット

Country Status (1)

Country Link
JP (1) JP4043077B2 (pl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4614578B2 (ja) * 2001-06-01 2011-01-19 キヤノンアネルバ株式会社 スパッタ成膜応用のためのプラズマ処理装置
CN105632855B (zh) * 2014-10-28 2018-05-25 北京北方华创微电子装备有限公司 一种磁控管及半导体加工设备
JP6672595B2 (ja) * 2015-03-17 2020-03-25 凸版印刷株式会社 成膜装置
US11322338B2 (en) 2017-08-31 2022-05-03 Taiwan Semiconductor Manufacturing Co., Ltd. Sputter target magnet

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