JPH1163361A5 - - Google Patents

Info

Publication number
JPH1163361A5
JPH1163361A5 JP1997238850A JP23885097A JPH1163361A5 JP H1163361 A5 JPH1163361 A5 JP H1163361A5 JP 1997238850 A JP1997238850 A JP 1997238850A JP 23885097 A JP23885097 A JP 23885097A JP H1163361 A5 JPH1163361 A5 JP H1163361A5
Authority
JP
Japan
Prior art keywords
heater
semiconductor manufacturing
branch pipes
exhaust pipe
branch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997238850A
Other languages
Japanese (ja)
Other versions
JPH1163361A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP9238850A priority Critical patent/JPH1163361A/en
Priority claimed from JP9238850A external-priority patent/JPH1163361A/en
Publication of JPH1163361A publication Critical patent/JPH1163361A/en
Publication of JPH1163361A5 publication Critical patent/JPH1163361A5/ja
Pending legal-status Critical Current

Links

Claims (2)

反応ガスを導入してウェーハの表面に所定の処理を行なう反応室内の圧力を計測する２つの圧力センサを、排気ガスが流れる排気管に設ける半導体製造装置において、In a semiconductor manufacturing device, two pressure sensors for measuring the pressure in a reaction chamber into which a reaction gas is introduced to perform a predetermined process on the surface of a wafer are provided in an exhaust pipe through which an exhaust gas flows,
前記２つの圧力センサはそれぞれ前記排気管に分岐管を介して設けられるとともに前記分岐管に仕切弁が設けられることを特徴とする半導体製造装置。The semiconductor manufacturing apparatus is characterized in that the two pressure sensors are respectively provided in the exhaust pipe via branch pipes, and the branch pipes are provided with gate valves. 前記排気管及び分岐管を加熱するヒータを設け、a heater for heating the exhaust pipe and the branch pipe;
一方の分岐管には、前記圧力センサに至る迄前記ヒータが設けられOne of the branch pipes is provided with the heater up to the pressure sensor.
他方の分岐管には、前記仕切弁迄の分岐管に前記ヒータが設けられていることを特徴とする請求項１記載の半導体製造装置。2. The semiconductor manufacturing apparatus according to claim 1, wherein the heater is provided in the other branch pipe up to the gate valve.
JP9238850A 1997-08-20 1997-08-20 Exhaust piping device Pending JPH1163361A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9238850A JPH1163361A (en) 1997-08-20 1997-08-20 Exhaust piping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9238850A JPH1163361A (en) 1997-08-20 1997-08-20 Exhaust piping device

Publications (2)

Publication Number Publication Date
JPH1163361A JPH1163361A (en) 1999-03-05
JPH1163361A5 true JPH1163361A5 (en) 2005-06-02

Family

ID=17036199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9238850A Pending JPH1163361A (en) 1997-08-20 1997-08-20 Exhaust piping device

Country Status (1)

Country Link
JP (1) JPH1163361A (en)

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