JPH1174582A - Azimuth sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an azimuth sensor wherein its size can be reduced while azimuth of line of magnetic force due to earth magnetism is measured with precision. SOLUTION: The azimuth sensor comprises first and second magnetic impedance effect elements (here after stated as MI element) 2 and 3 which detect the component in X-axis and Y-axis directions of the line of magnetic force due to external magnetic field, and coils 5 and 6 which apply the MI elements 2 and 3 with bias magnetization, and the MI elements 2 and 3 are so allocated on the same plane 4 that the current paths of AC current applied to each of them are orthogonal to each other, and the MI elements 1 and 3 comprises, as main component, one or more kinds of Fe, Co, and Ni and also comprises one or more kinds of element among Zr, Nb, Ta, Hf, Mo, Ti, and V as well as B, while being a soft magnetic metal glass alloy which is, of temperature interval ΔTx of subcooling liquid 20 K or above, represented by an equation ΔTx=Tx-Tg (where, Tx is crystallization start temperature, TG is glass transition temperature).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an azimuth sensor for detecting an azimuth of a magnetic field line due to terrestrial magnetism, and more particularly to an azimuth sensor having a magneto-impedance effect element made of a soft magnetic metallic glass alloy.

[0002]

2. Description of the Related Art Since a direction sensor can independently measure the direction of a magnetic field line due to an external magnetic field such as terrestrial magnetism, it is widely used as a means for detecting the position of a vehicle such as an on-board compass and a navigation system.

[0003] Among the above azimuth sensors, the flux gate sensor is widely used because of its excellent operation principle and high magnetic field detection sensitivity of about 10 ^-7 to 10 ^-6 G. However, since this flux gate sensor has a structure consisting of an annular magnetic core, an exciting winding wound around the magnetic core and applying a magnetic field, and a detection winding detecting the magnetic flux density of the magnetic core, the shape becomes massive. However, there is a problem that miniaturization cannot be achieved.

On the other hand, as another direction sensor, a direction sensor using a magnetoresistive element (hereinafter abbreviated as an MR element) has two
The two MR elements are arranged on the same plane so that the current paths of the currents applied to them are orthogonal to each other, and by connecting these two MR elements to a bridge or the like, the direction of the magnetic field lines due to the external magnetic field is detected. Since the shape is flat, the size can be reduced.

[0005]

However, a conventional azimuth sensor using an MR element has a resistance change rate of 3 to 6% with respect to the intrinsic resistance of the MR element itself due to a change in the intensity of an external magnetic field.
Since the resistance change is not so sharp and the resistance change is not sharp, it is difficult to accurately measure the azimuth of the line of magnetic force by an external magnetic field such as terrestrial magnetism.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide an azimuth sensor capable of miniaturizing its shape and capable of accurately measuring the azimuth of a magnetic field line due to terrestrial magnetism. With the goal.

[0007]

In order to achieve the above object, the present invention employs the following constitution. The azimuth sensor according to the present invention includes one or more of Fe, Co, and Ni as main components, and detects Zr, Nb, Ta, Hf, Mo, T
i, containing one or more elements of V and B and B;
ΔTx = Tx−Tg (where Tx is the crystallization onset temperature, Tx
(g denotes a glass transition temperature). A magnetic impedance effect element made of a soft magnetic metallic glass alloy having a temperature interval ΔTx of a supercooled liquid represented by the following formula: In the present invention, the composition may include Zr, and ΔTx is 25K or more.

The azimuth sensor according to the present invention is the azimuth sensor described above, wherein the first magneto-impedance effect element is a means for detecting a component in the X-axis direction of the magnetic field line due to the external magnetic field; And a second magneto-impedance effect element which is means for detecting a component in the Y-axis direction. Further, the azimuth sensor of the present invention,
The azimuth sensor described above, wherein the first and second magneto-impedance effect elements are arranged on the same plane such that current paths of alternating currents applied to the first and second magneto-impedance effect elements are orthogonal to each other. . Further, the azimuth sensor of the present invention,
The azimuth sensor described above, wherein the first and second magneto-impedance effect elements are wound with windings for applying bias magnetization along current paths of alternating currents applied to the first and second magneto-impedance effect elements, respectively. It is characterized by the following.

Further, the azimuth sensor according to the present invention is the azimuth sensor described above, wherein the soft magnetic metallic glass alloy has a Δ
Tx is 60K or more and is represented by the following composition. _{(Fe 1-ab Co a Ni} b) 100-xy M x B y where, 0 ≦ a ≦ 0.29,0 ≦ b ≦ 0.43,5 atomic%
≦ x ≦ 20 atomic%, 10 atomic% ≦ y ≦ 22 atomic%, and M is an element composed of one or more of Zr, Nb, Ta, Hf, Mo, Ti, and V. Further, the present invention is, 0.042 ≦ a ≦ in the _{(Fe 1-ab Co a Ni} b) 100-xy M x B y a composition formula 0.29,0.042
≦ b ≦ 0.43.

Further, the azimuth sensor of the present invention is the azimuth sensor described above, wherein the soft magnetic metallic glass alloy has a Δ
Tx is 60K or more and is represented by the following composition. _{(Fe 1-ab Co a Ni} b) 100-xyz M x B y T z where, 0 ≦ a ≦ 0.29,0 ≦ b ≦ 0.43,5 atomic%
≦ x ≦ 20 at%, 10 at% ≦ y ≦ 22 at%, 0 at% ≦ z ≦ 5 at%, and M is Zr, Nb, Ta, H
f, Mo, Ti, an element composed of one or more of V, T is Cr, W, Ru, Rh, Pd, Os, I
It is an element composed of one or more of r, Pt, Al, Si, Ge, C, and P. Further, the present invention is, 0.042 ≦ a ≦ 0.29,0.042 ≦ b ≦ in the _{(Fe 1-ab Co a Ni} b) 100-xyz M x B y T z a composition formula
A relationship of 0.43 may be used.

Next, the azimuth sensor of the present invention uses the element M
Is represented by (M ′ _1−c M ″ _c ), M ′ is one or two of Zr or Hf, and M ″ is Nb, Ta, Mo,
It may be an element composed of one or more of Ti and V, wherein 0 ≦ c ≦ 0.6. Further, in the composition of the soft magnetic metallic glass alloy, c may be in a range of 0.2 ≦ c ≦ 0.4, and c may be in a range of 0 ≦ c ≦ 0.2. There may be a feature. Further, the azimuth sensor according to the present invention, in the composition of the soft magnetic metallic glass alloy,
Is 0.042 ≦ a ≦ 0.25, b is 0.042 ≦ b ≦ 0.1
It may be characterized by being. The azimuth sensor according to the present invention may be characterized in that the soft magnetic metallic glass alloy is subjected to a heat treatment at 427 to 627 ° C. Further, 50% or less of the element B may be replaced with C in the composition of the soft magnetic metallic glass alloy.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, a direction sensor 1 includes a first magneto-impedance effect element (hereinafter, abbreviated as MI element) as a means for detecting a component of an external magnetic field in the X-axis direction.
2 and a second MI element 3 which is a means for detecting a component of an external magnetic field in the Y-axis direction perpendicular to the X-axis direction. A magneto-impedance effect element (MI element) is an element having a magneto-impedance effect. The magneto-impedance effect means that when an alternating current in the MHz band is applied from a power supply to a wire-shaped or ribbon-shaped magnetic material and an external magnetic field is applied in the longitudinal direction of the magnetic material, the external magnetic field is a weak magnetic field of about several gauss. In this case, a voltage is generated at both ends of the magnetic material due to the impedance inherent to the material, and the amplitude of the voltage changes within a range of several tens of percent corresponding to the intensity of the external magnetic field. The first and second MI elements 2 and 3
It is made of a soft magnetic metallic glass alloy containing one or more of e, Co, and Ni as main components, and has a substantially rectangular shape in plan view and a predetermined thickness. 1st, 2nd M
The I-elements 2 and 3 are arranged on the plane 4 such that the directions of the current paths of the alternating current applied to them are orthogonal to each other. That is, the first and second MI elements 2 and 3 are arranged such that their longitudinal directions are orthogonal to each other.
Specifically, the first and second MI elements 2 and 3 are fixed to the plane 4 by any means. The shape of the first and second MI elements 2 and 3 is plate-like in FIG. 1, but is not limited thereto, and may be rod-like, ribbon-like, wire-like, linear-like, or linear-like. It may be one obtained by twisting a plurality of molded bodies.

The first and second MI elements 2 and 3 have first and second MI elements 2 and 3, respectively.
A winding 5 for applying a bias magnetization along the direction of the current path of the alternating current applied to the MI elements 2 and 3, ie, along the longitudinal direction of the first and second MI elements 2 and 3. 6 is wound. Both ends of the windings 5 and 6 are connected to winding terminals 5a and 6
are connected to the external winding conductors 5b and 6b via a. Both ends 2a of the first and second MI elements 2 and 3 in the longitudinal direction,
2b, output wires 7, 8, for extracting output current,
9 is connected. The conductors 7, 9 are connected to the output terminals 7a, 9
are connected to the output external conductors 7b and 9b via a. Further, both ends of the conductor 8 are connected to the end 2 of the first MI element 2.
a and the end 3 a of the second MI element 3.
The conductor 8 is connected to an output external conductor 8b via an output terminal 8a. Further, a lead wire (not shown) for applying an alternating current is connected to both ends 2a and 3a in the longitudinal direction of the first and second MI elements 2 and 3, respectively.

The operation of the azimuth sensor 1 is as follows. In FIG. 1, an alternating current in the MHz band is applied to the first and second MI elements 2 and 3 from a conductor (not shown). At this time, a voltage is generated at each end 2a, 3a of each of the first and second MI elements 2, 3 by an impedance unique to each element. As shown in FIG.
The direction of the lines of magnetic force caused by the external magnetic field is arbitrary, and when the lines of magnetic force are applied to the first MI element 2, the impedance generated at both ends of the first MI element 2 is equal to the length of the lines of the first MI element 2. This corresponds to the magnitude of the component parallel to the direction (the component in the X-axis direction). Similarly, when this line of magnetic force is applied to the second MI element 3, the impedance generated at both ends of the second MI element 3 becomes a component of the line of magnetic force parallel to the longitudinal direction of the second MI element 3. (The component in the Y-axis direction). That is, when the direction of the line of magnetic force changes with respect to the first and second MI elements 2 and 3 due to the external magnetic field, the first and second MI elements 2 and 3 correspondingly change.
The impedance of the elements 2 and 3 changes, and the first and second MIs
The voltage value output from the elements 2 and 3 changes. In this way, in the azimuth sensor 1, an output current indicating a voltage value corresponding to the magnitude of the component of the terrestrial magnetism in the X-axis direction is taken out from the output terminals 7a and 8a, and the terrestrial magnetism is outputted from the output terminals 9a and 8a. An output current indicating a voltage value corresponding to the magnitude of the component in the Y-axis direction is extracted. These output currents are sent to a processing unit (not shown) via the external output conductors 7b, 8b, 9b. The processing unit measures the azimuth of the line of magnetic force due to terrestrial magnetism based on the obtained output current.

The magnetic detection sensitivity of the conventional MR element is 0.1
In contrast to Oe, an element having a magnetic impedance effect (MI element) can detect about 10 ^-5 Oe of magnetism. In particular, the first and second M of the present invention
When a self-oscillation circuit such as a Colpitts oscillation circuit is connected to the I-elements 2 and 3 and an alternating current of several to several tens of MHz is applied, the external magnetic field is stabilized with high sensitivity of about 10 ^-6 Oe and high resolution. , It is possible to detect a weak external magnetic field. Therefore, even when the first and second MI elements 2 and 3 are shaped such that the length in the longitudinal direction is reduced to reduce the impedance unique to the MI element, good magnetic detection sensitivity can be obtained. In addition, the size of the direction sensor 1 can be reduced.

Further, as described above, the direction sensor 1 of the present invention is provided with the windings 5 and 6 for applying bias magnetization to the first and second MI elements 2 and 3. As shown in FIG. 2A, the first and second MI elements 2 and 3 according to the present invention have an output voltage substantially symmetrically in the positive and negative directions depending on the absolute value of the external magnetic field with respect to the external magnetic field zero. (Change in impedance).

First and second MI elements 2 and 3 of the direction sensor 1
When the bias magnetization is not applied to the first MI element 2, as shown in FIG. 2B, when the direction of the line of magnetic force caused by the external magnetic field is changed from 0 to 90 ° with respect to the longitudinal direction of the first MI element 2, Output voltage from the MI element 2 of FIG. Further, when the direction of the magnetic field lines due to the external magnetic field is changed to 90 to 180 °, the output voltage from the first MI element 2 increases. At this time, the voltage values of the output voltages at 0 ° and 180 ° are the same, and the direction of the line of magnetic force cannot be measured accurately.

When a bias magnetization is applied to the first and second MI elements 2 and 3, a region where the impedance with respect to an external magnetic field changes linearly as shown in FIG. 2C. , The direction of the line of magnetic force
Even when the angle changes by 180 °, the change in the output voltage from the MI element is linear, and the direction of the external magnetic field can be accurately measured.

The magnitude of the bias magnetization applied to the first and second MI elements 2 and 3 is preferably in the range of 0.1 to 2 Oe in absolute value. When the magnitude of the bias magnetization is 0.
A range of 1 Oe or less or 2 Oe or more is not preferable because the impedance change with respect to the external magnetic field is not a linear change. Therefore, a DC current of several mA is sufficient as the bias current applied to the windings 5 and 6 for applying the bias magnetization.

The soft magnetic metallic glass alloy constituting the first and second MI elements 2 and 3 contains one or more of Fe, Co and Ni as main components, and ΔTx = Tx−Tg (where , Tx indicates a crystallization start temperature, and Tg indicates a glass transition temperature).
0K or more, depending on the composition, shows a remarkable temperature interval of 40 to 60K or more, so that molding by slow cooling becomes possible,
A relatively thick ribbon or linear shaped body can be produced.

In order to obtain a soft magnetic metallic glass alloy having a high magnetic impedance effect and having a ΔTx of 20 K or more, Z
One or more of r, Nb, Ta, Hf, Mo, Ti, and V and B are contained. More specifically illustrated, in the present invention, the composition can be expressed by the general formula _{(Fe 1-ab Co a Ni} b) 100-xy M x B y, in this formula,
0 ≦ a ≦ 0.29, 0 ≦ b ≦ 0.43, 5 atomic% ≦ x ≦ 2
The relation of 0 atomic%, 10 atomic% ≦ y ≦ 22 atomic% is preferable, and M is an element composed of one or more of Zr, Nb, Ta, Hf, Mo, Ti, and V. In the above composition, it is preferable that Zr is always contained and ΔTx is 25K or more. In the above composition, ΔTx
Is more preferably 60K or more. Furthermore, the _{(Fe 1-ab Co a Ni} b) 0.042 ≦ a ≦ 0.29,0.042 ≦ b ≦ 0.43 in the _100-xy M _x B _y becomes the general formula
It is preferable that the following relationship is satisfied.

Next, another soft magnetic metallic glass alloy according to the present invention has a composition of (Fe _{1 -ab} Co _a Ni _b ).
_{100-xyz M x B y T} z in the general formula can be represented in, in the general formula, 0 ≦ a ≦ 0.29,0 ≦ b ≦ 0.4
3, 5 at% ≦ x ≦ 20 at%, 10 at% ≦ y ≦ 22 at%, 0 at% ≦ z ≦ 5 at%, M is Zr, N
b, an element composed of one or more of Ta, Hf, Mo, Ti and V, and T is Cr, W, Ru, Rh, Pd,
One or more of Os, Ir, Pt, Al, Si, Ge, C and P. Further, the present invention is, 0.042 ≦ a ≦ 0.29,0.042 ≦ b ≦ in the _{(Fe 1-ab Co a Ni} b) 100-xyz M x B y T z consisting formula
A relationship of 0.43 may be used. Next, the element M is represented by (M ' _1-c M " _c ), and M' is Zr or H
f is one or two kinds, and M ″ is Nb, Ta,
Mo, Ti, or V is an element composed of one or more of Mo, Ti, and V, and may be characterized in that 0 ≦ c ≦ 0.6. Further, in the above composition, c is 0.2 ≦ c ≦ 0.2.
4, and may be in the range of c.
Is in the range of 0 ≦ c ≦ 0.2. Further, in the present invention, 0.042 ≦ a ≦ 0.25,
It may be characterized in that 0.042 ≦ b ≦ 0.1.

In the present invention, the soft magnetic metallic glass alloy may be heat-treated at 427 ° C. (700 K) to 627 ° C. (900 K). Those heat-treated at temperatures in this range exhibit high magnetic permeability. Note that, if quenched at the time of cooling after heating, the crystal phase precipitates and cannot be made amorphous. Therefore, the cooling rate after the heat treatment must be as low as possible, and treatment such as slow cooling or annealing after heating is preferable. In the above composition, 50% or less of the atoms B may be replaced with C.

[Reason for Composition Limitation] In the soft magnetic metallic glass alloy of the present invention, ΔTx tends to increase in a component system containing a large amount of Fe, which is a main component, and Co and Ni contents in a component system containing a large amount of Fe. Is set to an appropriate value, the value of ΔTx can be made 60K or more. Specifically, in order to reliably obtain ΔTx of 50K to 60K, the value of a indicating the composition ratio of Co is set to 0 ≦ a ≦ 0.29, N
The value of b indicating the composition ratio of i is in the range of 0 ≦ b ≦ 0.43, 6
In order to reliably obtain ΔTx of 0K or more, the value of a indicating the composition ratio of Co is set to 0.042 ≦ a ≦ 0.29, and the value of b indicating the composition ratio of Ni is set to 0.042 ≦ b ≦ 0.0. Preferably, it is in the range of 43. In order to obtain a good magneto-impedance effect within the above range, it is preferable that the value of a indicating the composition ratio of Co be in the range of 0.042 ≦ a ≦ 0.25. Is set to 0.042 ≦
It is more preferable that b ≦ 0.1.

M is Zr, Nb, Ta, Hf, Mo, T
It is an element composed of one or more of i and V.
These are effective elements for forming amorphous, and are preferably in the range of 5 at% to 20 at%, more preferably 5 at% to 15 at%. Among these elements M, Zr or Hf is particularly effective. Part of Zr or Hf can be replaced by an element such as Nb.
When Δc is in the range of 0.6, a high ΔTx can be obtained. In particular, when ΔTx is set to 80 or more, 0.2 ≦ c ≦
A range of 0.4 is preferred.

B has a high amorphous forming ability, and is added in the range of 10 to 22 atomic% in the present invention. Outside this range, if B is less than 10 atomic%, ΔTx disappears, which is not preferable.
If it is larger than this, it is not preferable because an amorphous phase cannot be formed. In order to obtain a higher amorphous forming ability and a better magneto-impedance effect, 16 atomic%
As described above, the content is more preferably set to 20 atomic% or less.

In the above composition system, C represented by T
r, W, Ru, Rh, Pd, Os, Ir, Pt, Al,
One or more elements of Si, Ge, C, and P can be added. In the present invention, these elements can be added in a range of 0 atomic% to 5 atomic%. These elements are added mainly for the purpose of improving the corrosion resistance, and if it is out of this range, the amorphous forming ability is undesirably deteriorated.

The first and second MI elements 2 and 3 made of the soft magnetic metallic glass alloy according to the present invention are melted and then cast by a casting method, or a quenching method using a single roll or twin rolls, and It is manufactured in various shapes such as bulk, thin ribbon (ribbon), and linear body by spinning or solution extraction. By these manufacturing methods, it is possible to obtain the first and second MI elements 2 and 3 having a thickness and a shape size that are 10 times or more as large as those of a ribbon-shaped MI element made of a conventional amorphous alloy. Even when used for the direction sensor 1,
Since the degree of freedom of the shapes of the first and second MI elements 2 and 3 is high,
Design and manufacture of the direction sensor 1 are facilitated.

The soft magnetic metallic glass alloy of the above composition obtained by these methods has a soft magnetic property (So
ft magnetism). This soft magnetic property is 300
It is further improved by performing a heat treatment in the range of from 500C to 500C. For this reason, it becomes useful for application to the direction sensor 1.

The above-mentioned direction sensor 1 is composed of Fe, Co, Ni
One or more of the above as a main component, Zr, N
one or two of b, Ta, Hf, Mo, Ti, V
At least one kind of element and B, ΔTx = Tx−Tg (where,
Tx indicates the crystallization onset temperature, and Tg indicates the glass transition temperature.)
Is provided with a MI element made of a soft magnetic metallic glass alloy having a temperature interval ΔTx of the supercooled liquid of 20K or more represented by the following formula, and a change in impedance with respect to a change in an external magnetic field is large. An external magnetic field can be detected. In addition, the first and second MI elements 2 and 3 according to the present invention have high detection sensitivity for the external magnetic field,
It is possible to reduce the size of the MI elements 2 and 3 and to reduce the size of the azimuth sensor 1. Further, the first and second MI elements 2 and 3 according to the present invention can easily obtain a compact having a larger thickness than a conventional amorphous alloy by a casting method, a single roll method, a twin roll method, or the like. Direction sensor 1
In the case where the first and second MI elements 2 and 3 are used, the degree of freedom of the shape of the first and second MI elements 2 and 3 is high, so that the design of the azimuth sensor 1 is facilitated. This is easy, and the manufacture of the direction sensor 1 is facilitated, and the manufacturing cost can be reduced.

The above-described azimuth sensor 1 includes a first MI element 2 for detecting a component of an external magnetic field in the X-axis direction and a second MI element 3 for detecting a component of the external magnetic field in the Y-axis direction.
The first and second MI elements 2 and 3 are arranged in the same plane 4 so that current paths of alternating currents applied to the first and second MI elements 2 and 3 are orthogonal to each other. Since the windings 5 and 6 for applying the bias magnetization along the current path of the alternating current applied to are wound, it is possible to accurately measure the azimuth of the magnetic lines of force due to terrestrial magnetism.

The first and second MI elements 2, 3
Since the change of the output voltage value is gentle and the change of the output voltage value is linear and the quantification is good in the range of a weak magnetic field of about -2 Oe to +2 Oe, the azimuth sensor The accuracy of the azimuth measurement of the magnetic field lines by the external magnetic field can be further improved. Further, the circuit configuration for processing the output voltage for measuring the azimuth of the external magnetic field becomes relatively simple, and the manufacturing cost of the azimuth sensor 1 can be reduced. Furthermore, since the bias magnetization applied to the first and second MI elements 2 and 3 can be as small as about 2 Oe at the maximum, the circuit configuration for applying the bias magnetization can be simplified.

The above-described azimuth sensor 1 includes first and second MI elements 2 and 3 made of a soft magnetic metallic glass alloy.
Since heat treatment in the range of 27 ° C. has been performed, good soft magnetic characteristics are exhibited, and the magnetic impedance effect can be improved, so that a weak external magnetic field such as terrestrial magnetism can be easily detected. .

[0034]

The present invention will be described in detail below with reference to embodiments. (Example 1) A pure metal of Fe, Co, Ni, Zr, and Nb and a pure boron crystal were mixed in an Ar gas atmosphere and arc-melted to produce a mother alloy. Next, this master alloy was melted in a crucible, and 40 m / m.
The copper roll rotating at S is blown out from a 0.4 mm diameter nozzle at the lower end of the crucible at an injection pressure of 0.39 × 10 ⁵ Pa to perform a single roll method of quenching, thereby obtaining a width of 0.4 to 0.4 mm.
A sample of a metallic glass alloy ribbon having a thickness of 1 mm and a thickness of 13 to 22 μm was manufactured. The obtained sample was subjected to differential scanning calorimetry (D
SC).

FIG. 3 shows each of Fe ₆₀ Co ₃ Ni ₇ Zr
_{10 B 20, Fe 56 Co 7} Ni 7 Zr 10 B 20, Fe 49 Co 14 N
3 shows a DSC curve of a metal glass alloy ribbon sample having a composition of i ₇ Zr ₁₀ B ₂₀ and Fe ₄₆ Co ₁₇ Ni ₇ Zr ₁₀ B ₂₀ . Also,
FIG. 4 shows a DSC curve of a metallic glass alloy ribbon sample having a composition of Fe ₅₆ Co ₇ Ni ₇ Zr ₈ Nb ₂ B ₂₀ . In each of these samples, it was confirmed that a wide supercooled liquid region was present by increasing the temperature, and it was clarified that crystallization was caused by heating beyond the supercooled liquid region. . The temperature interval ΔTx in the supercooled liquid region is
ΔTx = Tx−Tg, where Tx−T shown in FIG.
The value of g exceeds 60K for any of the samples, and is 64 to 68K.
Is in the range. Substantial equilibrium, indicating a supercooled liquid region, was obtained over a wide range from 596 ° C (869K) to 632 ° C (905K), slightly below the temperature at which crystallization due to the exothermic peak occurred.

FIG. 5 shows (Fe _{1 -ab} Co _a Ni _b ) ₇₀ Zr
_{FIG. 10} is a triangular composition diagram showing the dependence of the contents of Fe, Co, and Ni on the value of ΔTx (= Tx−Tg) in a composition system of ₁₀ B ₂₀ . As is clear from the results shown in FIG. 5, the value of ΔTx exceeds 25K in the entire range of the composition system of (Fe ₁ -ab Co _a Ni _b ) ₇₀ Zr ₁₀ B ₂₀ . On the other hand, it was found that ΔTx was a large value in the composition system containing a large amount of Fe, and ΔTx was 6
In order to make it 0K or more, the Co content is made 3 atomic% or more and 20% or more.
It is understood that it is preferable to set the Ni content to not more than 3 atomic% and not more than 30 atomic%. Note that (Fe
_1-ab Co _a Ni _b ) ₇₀ Zr ₁₀ B ₂₀
In order to make the o content 3 atomic% or more, (Fe _1-ab Co _a
Since Ni _b) is referred to as 70 atomic%, the composition ratio a of Co is 0.
042 or more, and to make the Co content 20 atom% or less,
The composition ratio a of Co becomes 0.29 or less. Similarly, N
In order to make the i content 3 atomic% or more, the Ni composition ratio b is 0.042 or more, and to make it 30 atomic% or less, the Ni composition ratio b is 0.43 or less.

[0037] (Example 2) In the same manner as in Example 1, the thickness of _{20~195μm Fe 56 Co 7 Ni 7 Zr} 4 Nb 6 B 20
A quenched ribbon having the following composition was produced. In the single roll method, when the molten alloy in the crucible is sprayed from the nozzle to the roll in the single roll method, the thickness of the crucible nozzle, the distance between the nozzle tip and the roll surface (gap), the number of rotations of the roll,
It was adjusted by appropriately adjusting the injection pressure, the atmospheric pressure, and the like. The resulting quenched ribbon was analyzed by X-ray diffraction. FIG. 6 shows the results. As shown in FIG.
Each of the thin ribbons of m has a halo pattern at 2θ = 38 to 52 °, which indicates that the ribbon has an amorphous single-phase structure.

Example 3 In the same manner as in Example 1, Fe 3
₆₄Co_ThreeNi_ThreeZr_TenB₂₀, Fe₆₀Co_ThreeNi₇Zr
_TenB₂₀, Fe₅₆Co₇Ni₇Zr_TenB₂₀, Fe₄₉Co₁₄N
i₇Zr_TenB₂₀, Fe₄₆Co₁₇Ni₇Zr_TenB₂₀Each set
A rapidly quenched ribbon was produced. About the obtained quenched ribbon,
Keep the quenched state (quenched state at the time of manufacturing) and the annealing temperature.
427 ° C (700K), 477 ° C (750K)
K) Each temperature at a temperature of 527 ° C. (800 K)
Saturation magnetic flux density (Bs), coercive force (Hc) and magnetic permeability of 1 kHz
The measurement results of the rate (μe) are shown below.

○ Fe ₆₄ Co ₃ Ni ₃ Zr ₁₀ B ₂₀ Sample quenched 427 ° C. Annealed 477 ° C. Annealed 527 ° C. Bs 0.91 0.88 0.91 0.92 Hc 3.4 2.9 2.6 2.0 μe 4666 9639 12635 11882 ○ Fe ₆₀ Co ₃ Ni ₇ Zr ₁₀ B ₂₀ Sample quenched 427 ° C. Annealed 477 ° C. Annealed 527 ° C. Annealed Bs 0.92 0.93 0.92 0.93 0.93 Hc 2.72 .1 2.2 1.7 μe 4173 9552 11702 10896 ○ Fe ₅₆ Co ₇ Ni ₇ Zr ₁₀ B ₂₀ Sample quenched 427 ° C. Annealed 477 ° C. Annealed 527 ° C. Annealed Bs 0.95 0.95 0.95 0.96 0.94 hc 6.1 2.88 2.41 3.06 μe 5100 14260 17659 8121 ○ remains 427 ° C. Annie _{Fe 49 Co 14 Ni 7 Zr 10} B 20 samples quenched 477 ° C. Annealing 527 ° C. annealing Bs 0.94 0.93 0.93 0.93 Hc 9.9 3.7 3.37 5.526 ○ Fe 46 Co 17 Ni 7 Zr 10 B 20 remain 427 ° C. Annealing of the sample quench Annealed at 477 ° C. Annealed at 527 ° C. Bs 0.96 0.95 0.95 0.96 Hc 10.8 3.2 3.3 6.4

From these measurement results, the MI of the azimuth sensor
In order to exhibit a good MI effect for use as an element, it is necessary that soft magnetic properties be good.
Atomic% or more and 17 atomic% or less, that is, the composition ratio a is 0.04
It is clear that it is preferable to use a sensor having a value of 2 or more and 0.25 or less for the direction sensor.

(Example 4) In the same manner as in Example 1, Fe
₅₆ Co ₇ Ni ₇ Zr _10-x Nb _x B ₂₀ (x = 0, 2, 4, 6, 8,
(10 at%). About the obtained quenched ribbon, the sample in the state of the quenched state and 52
FIG. 7 shows the Nb content dependence of the saturation magnetic flux density (Bs), coercive force (Hc), magnetic permeability at 1 kHz (μe), and magnetostriction (λs) of the sample annealed at a temperature of 7 ° C. (800 K) for 5 minutes. The saturation magnetic flux density (Bs) decreases with the addition of Nb in both the quenched state and the annealed sample,
The sample containing no Nb was 0.9 (T) or more, and the sample containing 2 atomic% of Nb was about 0.75 (T). Permeability (μ
The value of e) is 5031 for the sample not containing Nb and 2228 for the sample containing 2 atomic% of Nb among the samples in the quenched state.
And decreased to 906 in the sample containing 10 atomic% of Nb. However, by performing the annealing, the magnetic permeability (μe) is remarkably improved. In particular, in the sample containing 2 atomic% of Nb, a magnetic permeability (μe) of about 25000 can be obtained. Regarding the coercive force (Hc), in the sample in the quenched state, both the sample containing no Nb and the sample containing 2 atomic% of Nb had a low value of 50 A / m (= 0.625 Oe). In particular, a sample containing 2 atomic% or less of Nb is 5 A / m
(= 0.0625 Oe), which is a very good value. By performing the annealing, it is possible to obtain excellent coercive force (Hc) even in a sample containing 4 atomic% or more of Nb. As described above, in the alloy sample of this system, in order to obtain good soft magnetic properties, Nb is 0 or more and 2 atomic%.
It can be seen that the following ranges are more preferable. In this way, it is possible to obtain a metallic glass alloy having a high saturation magnetic flux density, a small coercive force, and a high magnetic permeability, which is excellent in soft magnetic properties. When fabricated, it is expected that weak geomagnetism can be detected and the accuracy of azimuth measurement can be increased.

(Embodiment 5) Next, Fe, Co, Ni, Z
A predetermined amount of each of r, Nb and B is weighed and mixed, and these materials are melted in a high-frequency induction heating furnace under a reduced-pressure Ar atmosphere, and the atomic composition ratio is Fe ₅₆ Co ₇ Ni ₇ Zr ₆ Nb ₄ B
Ingots of ₂₀ compositions were produced. This ingot was put into a crucible and melted, and a quenched ribbon having a thickness of 20 μm was obtained under a reduced-pressure Ar atmosphere by a single roll method in which a molten metal was blown out from a tip of a nozzle to a rotating roll to rapidly cool the roll. From this ribbon, length 6mm, width 0.1mm ~
A sample having a thickness of 0.2 mm and a thickness of 20 μm was cut out to obtain an MI device.

The above-described MI element was inserted into the magnetic field detection circuit shown in FIG.
An external magnetic field Hex is applied in the longitudinal direction of the element,
The relationship between (Oe) and the generated output voltage (mV) was examined. The amplification rate was set to 10 times. FIG. 9 shows the measurement results. FIG. 10 shows the MI element of Example 5 and the conventional F element.
e ₇₈ Si ₁₉ B ₁₃ and (Fe ₆ Co ₉₄ ) _72.5 Si _12.5 B
_In order to compare with the MI element having the composition of ₁₅ , the external magnetic field He
The results of examining the relationship between x (Oe) and the generated output voltage (mV) are shown.

The magnetic field detection circuit shown in FIG.
B and C, a high-frequency power supply unit, an external magnetic field (Hex) detection unit, and an amplification output unit, respectively. The MI element (Mi) is inserted in the external magnetic field detection unit (B). The high-frequency power supply unit (A) is a circuit for generating a high-frequency AC current and supplying it to the external magnetic field detection unit (B), and the type thereof is not particularly limited. Here, an example employing a stabilized Colwitz oscillation circuit will be described as an example. In the self-oscillation system, the magnetic field sensing operation can be performed by applying amplitude modulation (AM), frequency modulation (FM), or phase modulation (PM) using magnetic modulation. External magnetic field detector (B)
Represents an MI element (Mi) and a demodulation circuit. The impedance change generated by the MI element in a standby state by the high-frequency AC current supplied from the high-frequency power supply section (A) in response to the external magnetic field (Hex) is represented by: The signal is demodulated by the demodulation circuit and transmitted to the amplification output section (C). The amplification output section (C) has a differential amplifier circuit and an output terminal. An output voltage (mV) from the MI element is obtained from this output terminal.

In FIG. 9, the MI element of the fifth embodiment has
In a weak magnetic field band of about 4 Oe to +4 Oe, good quantitative performance is exhibited because there is a region where the output voltage value is high and the linearity is excellent. Therefore, when such an MI element is used as a direction sensor, a weak external magnetic field such as terrestrial magnetism can be detected, and the output voltage from the MI element due to the external magnetic field is processed to measure the direction of the external magnetic field. Circuit configuration can be simplified. Further, since the bias magnetization only needs to have a magnetization of about 2 Oe in absolute value, the circuit configuration for applying the bias magnetization can be simplified.

FIG. 10 shows that the MI element of Example 5 has a higher output voltage value and higher external magnetic field detection sensitivity than the conventional MI element having a composition of Fe ₇₈ Si ₁₉ B _13. . Further, the MI element of Example 5 has the conventional (Fe ₆ Co) within a weak magnetic field range (−2 Oe to +2 Oe).
₉₄ ) Since the rise of the output voltage is slower than that of the MI element having the composition of _72.5 Si _12.5 B ₁₅ , the quantitative property is improved and the circuit configuration of the azimuth sensor using the same is facilitated.

[0047]

As described in detail above, the azimuth sensor of the present invention is one or two of Fe, Co, and Ni.
Species or more as a main component, and Zr, Nb, Ta, Hf, Mo,
One or two or more elements of Ti and V and B, and an excess amount represented by a formula of ΔTx = Tx−Tg (where Tx indicates a crystallization start temperature and Tg indicates a glass transition temperature). A MI element made of a soft magnetic metallic glass alloy having a cooling liquid temperature interval ΔTx of 20K or more is provided. Since the detection sensitivity to a change in an external magnetic field is high, weak geomagnetism can be detected and the MI element can be detected. The size can be reduced, and the shape of the direction sensor can be reduced. Furthermore, since the MI element according to the present invention can easily obtain a ribbon-shaped or linear MI element having excellent workability, the design and production of the azimuth sensor can be facilitated, and the production cost can be reduced.

The azimuth sensor according to the present invention comprises a first MI element which is a means for detecting a component of an external magnetic field in the X-axis direction;
A second MI element, which is a means for detecting a component of an external magnetic field in the axial direction, wherein the first and second MI elements are arranged on the same plane so that current paths of alternating current applied thereto are orthogonal to each other. It is arranged, and a winding for applying a bias magnetization is wound along a current path of an alternating current applied to the MI element. Since the bias magnetization can be applied, a direction of a magnetic field line due to an external magnetic field such as terrestrial magnetism can be determined. Can be measured accurately.

[Brief description of the drawings]

FIG. 1 is a plan view showing an orientation sensor according to an embodiment of the present invention.

FIGS. 2A and 2B are diagrams showing a relationship between an external magnetic field and an output voltage of the MI element according to the embodiment of the present invention, wherein FIG.
5B is a graph showing the relationship between the external magnetization of the device and the output voltage, and FIG. 5B shows the relationship between the external magnetic field when the direction of the magnetic field lines of the external magnetic field is changed in the range of 0 to 180 ° with respect to the longitudinal direction of the MI device. It is a graph which shows the relationship with an output voltage, (c)
Is a graph showing the relationship between the external magnetic field and the output voltage when the direction of the magnetic field lines of the external magnetic field is changed in the same manner as in FIG.

FIG. 3 shows Fe ₆₀ Co ₃ Ni ₇ Zr ₁₀ B in Example 1.
_{20, Fe 56 Co 7 Ni 7} Zr 10 B 20, Fe 49 Co 14 Ni 7
Illustrates the DSC curve of _{Zr 10 B 20, Fe 46 Co} 17 Ni 7 Zr 10 B 20 consisting of each composition glassy alloy ribbon sample.

FIG. 4 shows Fe ₅₆ Co ₇ Ni ₇ Zr ₈ N in Example 1.
It illustrates the DSC curve of b ₂ B ₂₀ having a composition of metallic glass alloy ribbon sample.

FIG. 5 shows (Fe _{1 -ab} Co _a Ni _b ) in Example 1.
ΔTx (= Tx−Tg) in a composition system of ₇₀ Zr ₁₀ B ₂₀
FIG. 4 is a triangular composition diagram showing the dependence of Fe, Co, and Ni on the value of.

FIG. 6 is a diagram showing X-ray diffraction patterns at various plate thicknesses of a quenched ribbon having a composition of Fe ₅₆ Co ₇ Ni ₇ Zr ₄ Nb ₆ B ₂₀ .

FIG. 7: Fe ₅₆ Co ₇ Ni ₇ Zr _10-x Nb _x B ₂₀ (x =
Nb content dependence of saturation magnetic flux density (Bs), coercive force (Hc), permeability at 1 kHz (μe), and magnetostriction (λs) of a sample having a composition of 0, 2, 4, 6, 8, and 10 atomic%) FIG.

FIG. 8 is a circuit diagram illustrating a magnetic detection circuit using an MI element according to a fifth embodiment.

FIG. 9 is a graph showing the relationship between the external magnetization and the output voltage of the MI element of Example 5.

FIG. 10 is a graph showing a relationship between an external magnetization and an output voltage of Example 5 and a conventional MI element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Orientation sensor 2 1st MI element 3 2nd MI element 4 Plane 5 Winding for applying bias magnetization 6 Winding for applying bias magnetization 7 Output conductor 8 Output conductor 9 Output conductor

────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI H01F 1/153 H01L 43/00 H01L 43/00 H01F 1/14 C (72) Inventor Akihiro Makino 1 Yukiya Otsukacho, Ota-ku, Tokyo No. 7 Alps Electric Co., Ltd. (72) Nobuhiro Sudo, Inventor No. 1-7, Yukitani-Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Shin-ichi Sasakawa No. 1, Yukitani-Otsuka-cho, Ota-ku, Tokyo 7 Alps Electric Co., Ltd. (72) Inventor Yuichi Ikuuchi 1-7 Yukitani Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Akihisa Inoue 35 Kawachi Motohashikura, Aoba-ku, Sendai City, Miyagi Prefecture Address Kawauchi House 11-806

Claims (6)

[Claims] 1. As means for detecting the azimuth of lines of magnetic force caused by an external magnetic field, one or more of Fe, Co, and Ni are used as main components, and Zr, Nb, Ta, Hf, Mo,
One or two or more elements of Ti and V and B, and an excess amount represented by a formula of ΔTx = Tx−Tg (where Tx indicates a crystallization start temperature and Tg indicates a glass transition temperature). An azimuth sensor comprising a magneto-impedance effect element made of a soft magnetic metallic glass alloy having a cooling liquid temperature interval ΔTx of 20K or more. 2. The azimuth sensor according to claim 1, wherein the first magnetic impedance effect element is a means for detecting an X-axis component of a magnetic field line due to the external magnetic field, and a Y-axis of the magnetic field line due to the external magnetic field. A direction sensor comprising: a second magneto-impedance effect element serving as a direction component detection unit. 3. The azimuth sensor according to claim 2, wherein the first and second magneto-impedance effect elements are arranged on the same plane so that current paths of alternating currents applied to the first and second magneto-impedance effect elements are orthogonal to each other. An azimuth sensor characterized by being performed. 4. The azimuth sensor according to claim 3, wherein the first and second magneto-impedance effect elements are configured to apply a bias magnetization along a current path of an alternating current applied to each of the first and second magneto-impedance effect elements. An azimuth sensor in which a winding is wound. 5. The azimuth sensor according to claim 1, wherein
The azimuth sensor, wherein the soft magnetic metallic glass alloy has ΔTx of 60K or more and is represented by the following composition. _{(Fe 1-ab Co a Ni} b) 100-xy M x B y where, 0 ≦ a ≦ 0.29,0 ≦ b ≦ 0.43,5 atomic%
≦ x ≦ 20 atomic%, 10 atomic% ≦ y ≦ 22 atomic%, and M is an element composed of one or more of Zr, Nb, Ta, Hf, Mo, Ti, and V. 6. The azimuth sensor according to claim 1, wherein:
The azimuth sensor, wherein the soft magnetic metallic glass alloy has ΔTx of 60K or more and is represented by the following composition. _{(Fe 1-ab Co a Ni} b) 100-xyz M x B y T z where, 0 ≦ a ≦ 0.29,0 ≦ b ≦ 0.43,5 atomic%
≦ x ≦ 20 at%, 10 at% ≦ y ≦ 22 at%, 0 at% ≦ z ≦ 5 at%, and M is Zr, Nb, Ta, H
f, Mo, Ti, an element composed of one or more of V, T is Cr, W, Ru, Rh, Pd, Os, I
It is an element composed of one or more of r, Pt, Al, Si, Ge, C, and P.