JPS474130Y1 - - Google Patents
Info
- Publication number
- JPS474130Y1 JPS474130Y1 JP1969020666U JP2066669U JPS474130Y1 JP S474130 Y1 JPS474130 Y1 JP S474130Y1 JP 1969020666 U JP1969020666 U JP 1969020666U JP 2066669 U JP2066669 U JP 2066669U JP S474130 Y1 JPS474130 Y1 JP S474130Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969020666U JPS474130Y1 (de) | 1969-03-10 | 1969-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969020666U JPS474130Y1 (de) | 1969-03-10 | 1969-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS474130Y1 true JPS474130Y1 (de) | 1972-02-14 |
Family
ID=42902092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1969020666U Expired JPS474130Y1 (de) | 1969-03-10 | 1969-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS474130Y1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4619695A (en) * | 1983-09-22 | 1986-10-28 | Nihon Kogyo Kabushiki Kaisha | Process for producing high-purity metal targets for LSI electrodes |
-
1969
- 1969-03-10 JP JP1969020666U patent/JPS474130Y1/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4619695A (en) * | 1983-09-22 | 1986-10-28 | Nihon Kogyo Kabushiki Kaisha | Process for producing high-purity metal targets for LSI electrodes |
| US4770948A (en) * | 1983-09-22 | 1988-09-13 | Nihon Kogyo Kabushiki Kaisha | High-purity metal and metal silicide target for LSI electrodes |