JPS4845186A - - Google Patents
Info
- Publication number
- JPS4845186A JPS4845186A JP2372171A JP2372171A JPS4845186A JP S4845186 A JPS4845186 A JP S4845186A JP 2372171 A JP2372171 A JP 2372171A JP 2372171 A JP2372171 A JP 2372171A JP S4845186 A JPS4845186 A JP S4845186A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Light Receiving Elements (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2372171A JPS5542376B2 (ja) | 1971-04-13 | 1971-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2372171A JPS5542376B2 (ja) | 1971-04-13 | 1971-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4845186A true JPS4845186A (ja) | 1973-06-28 |
| JPS5542376B2 JPS5542376B2 (ja) | 1980-10-30 |
Family
ID=12118180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2372171A Expired JPS5542376B2 (ja) | 1971-04-13 | 1971-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5542376B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2835687B1 (en) * | 2013-08-06 | 2017-03-15 | Ams Ag | Method of producing a resist structure with undercut sidewall |
-
1971
- 1971-04-13 JP JP2372171A patent/JPS5542376B2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| SOVIET PHISICS-SOLID STOTE#V8#N2=1966 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5542376B2 (ja) | 1980-10-30 |