JPS4847500A - - Google Patents
Info
- Publication number
- JPS4847500A JPS4847500A JP8361271A JP8361271A JPS4847500A JP S4847500 A JPS4847500 A JP S4847500A JP 8361271 A JP8361271 A JP 8361271A JP 8361271 A JP8361271 A JP 8361271A JP S4847500 A JPS4847500 A JP S4847500A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361271A JPS4847500A (ja) | 1971-10-21 | 1971-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361271A JPS4847500A (ja) | 1971-10-21 | 1971-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4847500A true JPS4847500A (ja) | 1973-07-05 |
Family
ID=13807296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8361271A Pending JPS4847500A (ja) | 1971-10-21 | 1971-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4847500A (ja) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129817A (en) * | 1981-01-30 | 1982-08-12 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57140311A (en) * | 1981-02-19 | 1982-08-30 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57140312A (en) * | 1981-02-19 | 1982-08-30 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57156319A (en) * | 1981-03-19 | 1982-09-27 | Osaka Titanium Seizo Kk | Production of trichlorosilane |
| WO2008062632A1 (fr) * | 2006-11-21 | 2008-05-29 | Mitsubishi Materials Corporation | Appareil de production de trichlorosilane |
| WO2008062629A1 (fr) * | 2006-11-21 | 2008-05-29 | Mitsubishi Materials Corporation | Appareil pour la fabrication de trichlorosilane |
| JP2008150274A (ja) * | 2006-11-21 | 2008-07-03 | Mitsubishi Materials Corp | トリクロロシラン製造装置 |
| JP2008156216A (ja) * | 2006-11-28 | 2008-07-10 | Mitsubishi Materials Corp | トリクロロシラン製造装置 |
| WO2011009390A1 (zh) * | 2009-07-19 | 2011-01-27 | Chu Xi | 硅气转化的反应器和方法 |
| WO2019098343A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | トリクロロシランの製造方法および配管 |
| WO2019098345A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | トリクロロシラン製造装置およびトリクロロシランの製造方法 |
-
1971
- 1971-10-21 JP JP8361271A patent/JPS4847500A/ja active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129817A (en) * | 1981-01-30 | 1982-08-12 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57140311A (en) * | 1981-02-19 | 1982-08-30 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57140312A (en) * | 1981-02-19 | 1982-08-30 | Osaka Titanium Seizo Kk | Manufacture of trichlorosilane |
| JPS57156319A (en) * | 1981-03-19 | 1982-09-27 | Osaka Titanium Seizo Kk | Production of trichlorosilane |
| US8221691B2 (en) | 2006-11-21 | 2012-07-17 | Mitsubishi Materials Corporation | Apparatus for producing trichlorosilane |
| WO2008062632A1 (fr) * | 2006-11-21 | 2008-05-29 | Mitsubishi Materials Corporation | Appareil de production de trichlorosilane |
| WO2008062629A1 (fr) * | 2006-11-21 | 2008-05-29 | Mitsubishi Materials Corporation | Appareil pour la fabrication de trichlorosilane |
| JP2008150274A (ja) * | 2006-11-21 | 2008-07-03 | Mitsubishi Materials Corp | トリクロロシラン製造装置 |
| JP2008156216A (ja) * | 2006-11-28 | 2008-07-10 | Mitsubishi Materials Corp | トリクロロシラン製造装置 |
| WO2011009390A1 (zh) * | 2009-07-19 | 2011-01-27 | Chu Xi | 硅气转化的反应器和方法 |
| WO2019098343A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | トリクロロシランの製造方法および配管 |
| WO2019098345A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | トリクロロシラン製造装置およびトリクロロシランの製造方法 |
| JP6564554B1 (ja) * | 2017-11-20 | 2019-08-21 | 株式会社トクヤマ | トリクロロシランの製造方法 |
| KR20200088338A (ko) * | 2017-11-20 | 2020-07-22 | 가부시끼가이샤 도꾸야마 | 트리클로로실란의 제조 방법 및 배관 |
| CN111629997A (zh) * | 2017-11-20 | 2020-09-04 | 株式会社德山 | 三氯硅烷的制造方法及配管 |
| JPWO2019098345A1 (ja) * | 2017-11-20 | 2020-10-01 | 株式会社トクヤマ | トリクロロシラン製造装置およびトリクロロシランの製造方法 |
| US11612869B2 (en) | 2017-11-20 | 2023-03-28 | Tokuyama Corporation | Production method for trichlorosilane, and pipe |