JPS4851584A - - Google Patents
Info
- Publication number
- JPS4851584A JPS4851584A JP8584071A JP8584071A JPS4851584A JP S4851584 A JPS4851584 A JP S4851584A JP 8584071 A JP8584071 A JP 8584071A JP 8584071 A JP8584071 A JP 8584071A JP S4851584 A JPS4851584 A JP S4851584A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584071A JPS5412792B2 (fr) | 1971-10-27 | 1971-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584071A JPS5412792B2 (fr) | 1971-10-27 | 1971-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4851584A true JPS4851584A (fr) | 1973-07-19 |
| JPS5412792B2 JPS5412792B2 (fr) | 1979-05-25 |
Family
ID=13870042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8584071A Expired JPS5412792B2 (fr) | 1971-10-27 | 1971-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5412792B2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57193025A (en) * | 1981-05-25 | 1982-11-27 | Semiconductor Energy Lab Co Ltd | Manufacture of film |
| JPS60124818A (ja) * | 1983-12-08 | 1985-07-03 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 金属間化合物半導体結晶の成長方法 |
-
1971
- 1971-10-27 JP JP8584071A patent/JPS5412792B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57193025A (en) * | 1981-05-25 | 1982-11-27 | Semiconductor Energy Lab Co Ltd | Manufacture of film |
| JPS60124818A (ja) * | 1983-12-08 | 1985-07-03 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 金属間化合物半導体結晶の成長方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5412792B2 (fr) | 1979-05-25 |