JPS4851653A - - Google Patents
Info
- Publication number
- JPS4851653A JPS4851653A JP8524971A JP8524971A JPS4851653A JP S4851653 A JPS4851653 A JP S4851653A JP 8524971 A JP8524971 A JP 8524971A JP 8524971 A JP8524971 A JP 8524971A JP S4851653 A JPS4851653 A JP S4851653A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8524971A JPS4851653A (de) | 1971-10-28 | 1971-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8524971A JPS4851653A (de) | 1971-10-28 | 1971-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4851653A true JPS4851653A (de) | 1973-07-20 |
Family
ID=13853282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8524971A Pending JPS4851653A (de) | 1971-10-28 | 1971-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4851653A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990009A (ja) * | 1982-11-15 | 1984-05-24 | Rikagaku Kenkyusho | 物体形状測定法と物体形状測定装置 |
| WO1985005674A1 (en) * | 1984-05-31 | 1985-12-19 | Matsushita Electric Industrial Co., Ltd. | Shape evaluating apparatus |
| JP2017533445A (ja) * | 2014-10-03 | 2017-11-09 | サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィク | 光遠隔測定装置 |
-
1971
- 1971-10-28 JP JP8524971A patent/JPS4851653A/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| THE DESIGN OF LASER INTERFEREMETERS FOR USE IN FLUID MECHANICS=1966 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5990009A (ja) * | 1982-11-15 | 1984-05-24 | Rikagaku Kenkyusho | 物体形状測定法と物体形状測定装置 |
| WO1985005674A1 (en) * | 1984-05-31 | 1985-12-19 | Matsushita Electric Industrial Co., Ltd. | Shape evaluating apparatus |
| JP2017533445A (ja) * | 2014-10-03 | 2017-11-09 | サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィク | 光遠隔測定装置 |