JPS4855652A - - Google Patents
Info
- Publication number
- JPS4855652A JPS4855652A JP46089833A JP8983371A JPS4855652A JP S4855652 A JPS4855652 A JP S4855652A JP 46089833 A JP46089833 A JP 46089833A JP 8983371 A JP8983371 A JP 8983371A JP S4855652 A JPS4855652 A JP S4855652A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46089833A JPS5131146B2 (ja) | 1971-11-12 | 1971-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46089833A JPS5131146B2 (ja) | 1971-11-12 | 1971-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4855652A true JPS4855652A (ja) | 1973-08-04 |
| JPS5131146B2 JPS5131146B2 (ja) | 1976-09-04 |
Family
ID=13981748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46089833A Expired JPS5131146B2 (ja) | 1971-11-12 | 1971-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5131146B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215545A (ja) * | 1988-07-01 | 1990-01-19 | Hitachi Ltd | Ｘ線マスクの欠陥検査方法及びその装置 |
-
1971
- 1971-11-12 JP JP46089833A patent/JPS5131146B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215545A (ja) * | 1988-07-01 | 1990-01-19 | Hitachi Ltd | Ｘ線マスクの欠陥検査方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5131146B2 (ja) | 1976-09-04 |