JPS49118449A - - Google Patents
Info
- Publication number
- JPS49118449A JPS49118449A JP2856273A JP2856273A JPS49118449A JP S49118449 A JPS49118449 A JP S49118449A JP 2856273 A JP2856273 A JP 2856273A JP 2856273 A JP2856273 A JP 2856273A JP S49118449 A JPS49118449 A JP S49118449A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2856273A JPS49118449A (de) | 1973-03-13 | 1973-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2856273A JPS49118449A (de) | 1973-03-13 | 1973-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49118449A true JPS49118449A (de) | 1974-11-12 |
Family
ID=12252069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2856273A Pending JPS49118449A (de) | 1973-03-13 | 1973-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49118449A (de) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50104050A (de) * | 1974-01-18 | 1975-08-16 | ||
| JPS522550A (en) * | 1975-06-24 | 1977-01-10 | Japan Radio Co Ltd | Method to measure surface shape |
| JPS53109660A (en) * | 1977-03-04 | 1978-09-25 | Osaka Kiko Co Ltd | Measuring method of straightness in three points |
| JPS57207812A (en) * | 1981-06-17 | 1982-12-20 | Mitsubishi Heavy Ind Ltd | Straightness measuring method |
| JPS58500628A (ja) * | 1981-04-27 | 1983-04-21 | カイザ− スチ−ル コ−ポレ−シヨン | 横方向波打ち測定装置 |
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |
-
1973
- 1973-03-13 JP JP2856273A patent/JPS49118449A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50104050A (de) * | 1974-01-18 | 1975-08-16 | ||
| JPS522550A (en) * | 1975-06-24 | 1977-01-10 | Japan Radio Co Ltd | Method to measure surface shape |
| JPS53109660A (en) * | 1977-03-04 | 1978-09-25 | Osaka Kiko Co Ltd | Measuring method of straightness in three points |
| JPS58500628A (ja) * | 1981-04-27 | 1983-04-21 | カイザ− スチ−ル コ−ポレ−シヨン | 横方向波打ち測定装置 |
| JPS57207812A (en) * | 1981-06-17 | 1982-12-20 | Mitsubishi Heavy Ind Ltd | Straightness measuring method |
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |