JPS4915899A - - Google Patents

Info

Publication number
JPS4915899A
JPS4915899A JP5651272A JP5651272A JPS4915899A JP S4915899 A JPS4915899 A JP S4915899A JP 5651272 A JP5651272 A JP 5651272A JP 5651272 A JP5651272 A JP 5651272A JP S4915899 A JPS4915899 A JP S4915899A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5651272A
Other languages
Japanese (ja)
Other versions
JPS5236240B2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651272A priority Critical patent/JPS5236240B2/ja
Publication of JPS4915899A publication Critical patent/JPS4915899A/ja
Publication of JPS5236240B2 publication Critical patent/JPS5236240B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5651272A 1972-06-08 1972-06-08 Expired JPS5236240B2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 ( ) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 ( ) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4915899A true JPS4915899A ( ) 1974-02-12
JPS5236240B2 JPS5236240B2 ( ) 1977-09-14

Family

ID=13029164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651272A Expired JPS5236240B2 ( ) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5236240B2 ( )

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U ( ) * 1989-09-08 1991-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U ( ) * 1989-09-08 1991-04-25

Also Published As

Publication number Publication date
JPS5236240B2 ( ) 1977-09-14

Similar Documents

Publication Publication Date Title
JPS4912905U ( )
JPS516010B2 ( )
JPS4954367A ( )
JPS4985906A ( )
JPS4915899A ( )
JPS4947729A ( )
JPS4936905A ( )
JPS4942897U ( )
JPS4960413A ( )
JPS5211790Y2 ( )
JPS5637533B2 ( )
JPS4876274A ( )
JPS4918637U ( )
JPS4949347A ( )
JPS4963746U ( )
JPS4951372U ( )
JPS494957U ( )
JPS4943712U ( )
JPS48114572U ( )
JPS4888139A ( )
BG18343A1 ( )
BG18508A1 ( )
NL7313538A ( )
CH545622A ( )
CH601233A5 ( )