JPS4934573B1 - - Google Patents
Info
- Publication number
- JPS4934573B1 JPS4934573B1 JP9716970A JP9716970A JPS4934573B1 JP S4934573 B1 JPS4934573 B1 JP S4934573B1 JP 9716970 A JP9716970 A JP 9716970A JP 9716970 A JP9716970 A JP 9716970A JP S4934573 B1 JPS4934573 B1 JP S4934573B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9716970A JPS4934573B1 (de) | 1970-11-06 | 1970-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9716970A JPS4934573B1 (de) | 1970-11-06 | 1970-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4934573B1 true JPS4934573B1 (de) | 1974-09-14 |
Family
ID=14185062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9716970A Pending JPS4934573B1 (de) | 1970-11-06 | 1970-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4934573B1 (de) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004027107A1 (ja) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | 成膜装置用マスキング機構 |
| WO2004083481A1 (ja) * | 2003-03-20 | 2004-09-30 | Japan Science And Technology Agency | ４元組成比傾斜膜の作成方法及びこの方法を用いた２元組成比・膜厚傾斜膜の作成方法並びに多元組成物質の組成比のサンプリング方法 |
| JP2007508450A (ja) * | 2003-10-09 | 2007-04-05 | ユニヴァーシティ・オブ・サウザンプトン | 蒸着法 |
| JP2009155319A (ja) * | 1994-10-18 | 2009-07-16 | Regents Of The Univ Of California | 新規材料の組合せ合成方法 |
| JP2020084254A (ja) * | 2018-11-22 | 2020-06-04 | 長州産業株式会社 | 蒸着装置及び蒸着方法 |
-
1970
- 1970-11-06 JP JP9716970A patent/JPS4934573B1/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009155319A (ja) * | 1994-10-18 | 2009-07-16 | Regents Of The Univ Of California | 新規材料の組合せ合成方法 |
| WO2004027107A1 (ja) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | 成膜装置用マスキング機構 |
| US9157144B2 (en) | 2002-09-20 | 2015-10-13 | Japan Science And Technology Agency | Masking mechanism for film forming apparatus |
| WO2004083481A1 (ja) * | 2003-03-20 | 2004-09-30 | Japan Science And Technology Agency | ４元組成比傾斜膜の作成方法及びこの方法を用いた２元組成比・膜厚傾斜膜の作成方法並びに多元組成物質の組成比のサンプリング方法 |
| JP2007508450A (ja) * | 2003-10-09 | 2007-04-05 | ユニヴァーシティ・オブ・サウザンプトン | 蒸着法 |
| JP2020084254A (ja) * | 2018-11-22 | 2020-06-04 | 長州産業株式会社 | 蒸着装置及び蒸着方法 |