JPS495266A - - Google Patents

Info

Publication number
JPS495266A
JPS495266A JP4348272A JP4348272A JPS495266A JP S495266 A JPS495266 A JP S495266A JP 4348272 A JP4348272 A JP 4348272A JP 4348272 A JP4348272 A JP 4348272A JP S495266 A JPS495266 A JP S495266A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4348272A
Other languages
Japanese (ja)
Other versions
JPS5132501B2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4348272A priority Critical patent/JPS5132501B2/ja
Publication of JPS495266A publication Critical patent/JPS495266A/ja
Publication of JPS5132501B2 publication Critical patent/JPS5132501B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4348272A 1972-05-01 1972-05-01 Expired JPS5132501B2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4348272A JPS5132501B2 (2) 1972-05-01 1972-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4348272A JPS5132501B2 (2) 1972-05-01 1972-05-01

Publications (2)

Publication Number Publication Date
JPS495266A true JPS495266A (2) 1974-01-17
JPS5132501B2 JPS5132501B2 (2) 1976-09-13

Family

ID=12664930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4348272A Expired JPS5132501B2 (2) 1972-05-01 1972-05-01

Country Status (1)

Country Link
JP (1) JPS5132501B2 (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773176A (en) * 1980-08-21 1982-05-07 Nat Res Dev Coating adhesion
JPH01307443A (ja) * 1988-06-03 1989-12-12 Tokyo Electron Ltd プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773176A (en) * 1980-08-21 1982-05-07 Nat Res Dev Coating adhesion
JPH01307443A (ja) * 1988-06-03 1989-12-12 Tokyo Electron Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS5132501B2 (2) 1976-09-13

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