JPS4964199A - - Google Patents

Info

Publication number
JPS4964199A
JPS4964199A JP10800172A JP10800172A JPS4964199A JP S4964199 A JPS4964199 A JP S4964199A JP 10800172 A JP10800172 A JP 10800172A JP 10800172 A JP10800172 A JP 10800172A JP S4964199 A JPS4964199 A JP S4964199A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10800172A
Other versions
JPS5610240B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10800172A priority Critical patent/JPS5610240B2/ja
Publication of JPS4964199A publication Critical patent/JPS4964199A/ja
Publication of JPS5610240B2 publication Critical patent/JPS5610240B2/ja
Expired legal-status Critical Current

Links

JP10800172A 1972-10-30 1972-10-30 Expired JPS5610240B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10800172A JPS5610240B2 (ja) 1972-10-30 1972-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10800172A JPS5610240B2 (ja) 1972-10-30 1972-10-30

Publications (2)

Publication Number Publication Date
JPS4964199A true JPS4964199A (ja) 1974-06-21
JPS5610240B2 JPS5610240B2 (ja) 1981-03-06

Family

ID=14473455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10800172A Expired JPS5610240B2 (ja) 1972-10-30 1972-10-30

Country Status (1)

Country Link
JP (1) JPS5610240B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253233A (ja) * 2009-04-03 2010-11-11 Taichi Hanmyo 鏡台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062143A (ja) * 1992-06-16 1994-01-11 Canon Inc 堆積膜形成装置のクリーニング方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062143A (ja) * 1992-06-16 1994-01-11 Canon Inc 堆積膜形成装置のクリーニング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253233A (ja) * 2009-04-03 2010-11-11 Taichi Hanmyo 鏡台

Also Published As

Publication number Publication date
JPS5610240B2 (ja) 1981-03-06

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