JPS4964199A - - Google Patents
Info
- Publication number
- JPS4964199A JPS4964199A JP10800172A JP10800172A JPS4964199A JP S4964199 A JPS4964199 A JP S4964199A JP 10800172 A JP10800172 A JP 10800172A JP 10800172 A JP10800172 A JP 10800172A JP S4964199 A JPS4964199 A JP S4964199A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10800172A JPS5610240B2 (ja) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10800172A JPS5610240B2 (ja) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4964199A true JPS4964199A (ja) | 1974-06-21 |
| JPS5610240B2 JPS5610240B2 (ja) | 1981-03-06 |
Family
ID=14473455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10800172A Expired JPS5610240B2 (ja) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5610240B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010253233A (ja) * | 2009-04-03 | 2010-11-11 | Taichi Hanmyo | 鏡台 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062143A (ja) * | 1992-06-16 | 1994-01-11 | Canon Inc | 堆積膜形成装置のクリーニング方法 |
-
1972
- 1972-10-30 JP JP10800172A patent/JPS5610240B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062143A (ja) * | 1992-06-16 | 1994-01-11 | Canon Inc | 堆積膜形成装置のクリーニング方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010253233A (ja) * | 2009-04-03 | 2010-11-11 | Taichi Hanmyo | 鏡台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5610240B2 (ja) | 1981-03-06 |