JPS4966060A - - Google Patents

Info

Publication number
JPS4966060A
JPS4966060A JP47107999A JP10799972A JPS4966060A JP S4966060 A JPS4966060 A JP S4966060A JP 47107999 A JP47107999 A JP 47107999A JP 10799972 A JP10799972 A JP 10799972A JP S4966060 A JPS4966060 A JP S4966060A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47107999A
Other languages
Japanese (ja)
Other versions
JPS5138577B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47107999A priority Critical patent/JPS5138577B2/ja
Publication of JPS4966060A publication Critical patent/JPS4966060A/ja
Publication of JPS5138577B2 publication Critical patent/JPS5138577B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47107999A 1972-10-30 1972-10-30 Expired JPS5138577B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47107999A JPS5138577B2 (en) 1972-10-30 1972-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47107999A JPS5138577B2 (en) 1972-10-30 1972-10-30

Publications (2)

Publication Number Publication Date
JPS4966060A true JPS4966060A (en) 1974-06-26
JPS5138577B2 JPS5138577B2 (en) 1976-10-22

Family

ID=14473405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47107999A Expired JPS5138577B2 (en) 1972-10-30 1972-10-30

Country Status (1)

Country Link
JP (1) JPS5138577B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221764A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Scattering electron checking diaphragm
JPS52129272A (en) * 1976-04-23 1977-10-29 Nippon Telegr & Teleph Corp <Ntt> Charge beam diameter control unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221764A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Scattering electron checking diaphragm
JPS52129272A (en) * 1976-04-23 1977-10-29 Nippon Telegr & Teleph Corp <Ntt> Charge beam diameter control unit

Also Published As

Publication number Publication date
JPS5138577B2 (en) 1976-10-22

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