JPS4976778A - - Google Patents
Info
- Publication number
- JPS4976778A JPS4976778A JP11876672A JP11876672A JPS4976778A JP S4976778 A JPS4976778 A JP S4976778A JP 11876672 A JP11876672 A JP 11876672A JP 11876672 A JP11876672 A JP 11876672A JP S4976778 A JPS4976778 A JP S4976778A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11876672A JPS4976778A (fr) | 1972-11-27 | 1972-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11876672A JPS4976778A (fr) | 1972-11-27 | 1972-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4976778A true JPS4976778A (fr) | 1974-07-24 |
Family
ID=14744523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11876672A Pending JPS4976778A (fr) | 1972-11-27 | 1972-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4976778A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010018871A (ja) * | 2008-07-14 | 2010-01-28 | Ulvac Japan Ltd | 同軸型真空アーク蒸着源及び真空蒸着装置 |
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1972
- 1972-11-27 JP JP11876672A patent/JPS4976778A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010018871A (ja) * | 2008-07-14 | 2010-01-28 | Ulvac Japan Ltd | 同軸型真空アーク蒸着源及び真空蒸着装置 |