JPS50142497A - - Google Patents
Info
- Publication number
- JPS50142497A JPS50142497A JP4902074A JP4902074A JPS50142497A JP S50142497 A JPS50142497 A JP S50142497A JP 4902074 A JP4902074 A JP 4902074A JP 4902074 A JP4902074 A JP 4902074A JP S50142497 A JPS50142497 A JP S50142497A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4902074A JPS50142497A (ja) | 1974-04-30 | 1974-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4902074A JPS50142497A (ja) | 1974-04-30 | 1974-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50142497A true JPS50142497A (ja) | 1975-11-17 |
Family
ID=12819427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4902074A Pending JPS50142497A (ja) | 1974-04-30 | 1974-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50142497A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03107464A (ja) * | 1989-08-31 | 1991-05-07 | American Teleph & Telegr Co <Att> | 誘電体膜堆積方法および装置 |
| JP2006070342A (ja) * | 2004-09-03 | 2006-03-16 | Sumitomo Electric Ind Ltd | 気相成膜装置、サセプタおよび気相成膜方法 |
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1974
- 1974-04-30 JP JP4902074A patent/JPS50142497A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03107464A (ja) * | 1989-08-31 | 1991-05-07 | American Teleph & Telegr Co <Att> | 誘電体膜堆積方法および装置 |
| JP2006070342A (ja) * | 2004-09-03 | 2006-03-16 | Sumitomo Electric Ind Ltd | 気相成膜装置、サセプタおよび気相成膜方法 |