JPS501667A - - Google Patents

Info

Publication number
JPS501667A
JPS501667A JP48049720A JP4972073A JPS501667A JP S501667 A JPS501667 A JP S501667A JP 48049720 A JP48049720 A JP 48049720A JP 4972073 A JP4972073 A JP 4972073A JP S501667 A JPS501667 A JP S501667A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48049720A
Other languages
Japanese (ja)
Other versions
JPS565574B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4972073A priority Critical patent/JPS565574B2/ja
Publication of JPS501667A publication Critical patent/JPS501667A/ja
Publication of JPS565574B2 publication Critical patent/JPS565574B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
JP4972073A 1973-05-07 1973-05-07 Expired JPS565574B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4972073A JPS565574B2 (en) 1973-05-07 1973-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4972073A JPS565574B2 (en) 1973-05-07 1973-05-07

Publications (2)

Publication Number Publication Date
JPS501667A true JPS501667A (en) 1975-01-09
JPS565574B2 JPS565574B2 (en) 1981-02-05

Family

ID=12839013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4972073A Expired JPS565574B2 (en) 1973-05-07 1973-05-07

Country Status (1)

Country Link
JP (1) JPS565574B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119478A (en) * 1975-04-10 1976-10-20 Nakamuratome Seimitsu Kogyo Kk Flow adjusting method for flow adjusting valve and motor direction swi tch flow adjusting valve
JPS5685826A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Vacuum treatment device
JPS5696840A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating method
JPS5696841A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating apparatus
JPS56174846U (en) * 1980-05-26 1981-12-23
JPS5735322A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photo-resist film
JPS5735323A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photoresist film
DE3049036A1 (en) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim METHOD FOR SIMULTANEOUSLY, CONTINUOUSLY STRENGTHENING AND COATING A nonwoven
DE3049037A1 (en) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim METHOD FOR SIMULTANEOUSLY, CONTINUOUSLY STRENGTHENING AND COATING A nonwoven
JPS5887825A (en) * 1981-11-20 1983-05-25 Fujitsu Ltd Microwave plasma treatment apparatus
JPH02224237A (en) * 1990-01-16 1990-09-06 Hitachi Ltd Vacuum treatment method

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119478A (en) * 1975-04-10 1976-10-20 Nakamuratome Seimitsu Kogyo Kk Flow adjusting method for flow adjusting valve and motor direction swi tch flow adjusting valve
JPS5685826A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Vacuum treatment device
JPS5696840A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating method
JPS5696841A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating apparatus
JPS56174846U (en) * 1980-05-26 1981-12-23
JPS5735323A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photoresist film
JPS5735322A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photo-resist film
DE3049036A1 (en) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim METHOD FOR SIMULTANEOUSLY, CONTINUOUSLY STRENGTHENING AND COATING A nonwoven
DE3049037A1 (en) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim METHOD FOR SIMULTANEOUSLY, CONTINUOUSLY STRENGTHENING AND COATING A nonwoven
DE3049037C2 (en) * 1980-12-24 1984-05-03 Fa. Carl Freudenberg, 6940 Weinheim Process for the simultaneous, continuous consolidation and coating of a nonwoven fabric
DE3049036C2 (en) * 1980-12-24 1984-09-13 Fa. Carl Freudenberg, 6940 Weinheim Process for the simultaneous, continuous consolidation and coating of a nonwoven fabric
JPS5887825A (en) * 1981-11-20 1983-05-25 Fujitsu Ltd Microwave plasma treatment apparatus
JPH02224237A (en) * 1990-01-16 1990-09-06 Hitachi Ltd Vacuum treatment method

Also Published As

Publication number Publication date
JPS565574B2 (en) 1981-02-05

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