JPS5031570A - - Google Patents
Info
- Publication number
- JPS5031570A JPS5031570A JP8142373A JP8142373A JPS5031570A JP S5031570 A JPS5031570 A JP S5031570A JP 8142373 A JP8142373 A JP 8142373A JP 8142373 A JP8142373 A JP 8142373A JP S5031570 A JPS5031570 A JP S5031570A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Relays Between Conveyors (AREA)
- Special Conveying (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8142373A JPS5551805B2 (en) | 1973-07-21 | 1973-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8142373A JPS5551805B2 (en) | 1973-07-21 | 1973-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5031570A true JPS5031570A (en) | 1975-03-28 |
| JPS5551805B2 JPS5551805B2 (en) | 1980-12-26 |
Family
ID=13745937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8142373A Expired JPS5551805B2 (en) | 1973-07-21 | 1973-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5551805B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60202014A (en) * | 1984-03-23 | 1985-10-12 | Hitachi Electronics Eng Co Ltd | Conveying direction changer for semiconductor wafer |
| JPS6127830A (en) * | 1984-07-17 | 1986-02-07 | Dainippon Screen Mfg Co Ltd | Inversion of carrying direction of substrate and device thereof |
| JPS6145296U (en) * | 1984-08-30 | 1986-03-26 | 防衛庁技術研究本部長 | Load transport equipment |
| JP2015140241A (en) * | 2014-01-29 | 2015-08-03 | 伊東電機株式会社 | Transfer device and positioning method for device having motor |
-
1973
- 1973-07-21 JP JP8142373A patent/JPS5551805B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60202014A (en) * | 1984-03-23 | 1985-10-12 | Hitachi Electronics Eng Co Ltd | Conveying direction changer for semiconductor wafer |
| JPS6127830A (en) * | 1984-07-17 | 1986-02-07 | Dainippon Screen Mfg Co Ltd | Inversion of carrying direction of substrate and device thereof |
| JPS6145296U (en) * | 1984-08-30 | 1986-03-26 | 防衛庁技術研究本部長 | Load transport equipment |
| JP2015140241A (en) * | 2014-01-29 | 2015-08-03 | 伊東電機株式会社 | Transfer device and positioning method for device having motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5551805B2 (en) | 1980-12-26 |