JPS5056155A - - Google Patents
Info
- Publication number
- JPS5056155A JPS5056155A JP48103566A JP10356673A JPS5056155A JP S5056155 A JPS5056155 A JP S5056155A JP 48103566 A JP48103566 A JP 48103566A JP 10356673 A JP10356673 A JP 10356673A JP S5056155 A JPS5056155 A JP S5056155A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48103566A JPS5056155A (fr) | 1973-09-13 | 1973-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48103566A JPS5056155A (fr) | 1973-09-13 | 1973-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5056155A true JPS5056155A (fr) | 1975-05-16 |
Family
ID=14357341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48103566A Pending JPS5056155A (fr) | 1973-09-13 | 1973-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5056155A (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3682699A (en) * | 1968-10-25 | 1972-08-08 | Hitachi Ltd | Method of vapor growth of a semiconductor crystal |
-
1973
- 1973-09-13 JP JP48103566A patent/JPS5056155A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3682699A (en) * | 1968-10-25 | 1972-08-08 | Hitachi Ltd | Method of vapor growth of a semiconductor crystal |