JPS51101783A - SHINKUSHORISOCHI - Google Patents

SHINKUSHORISOCHI

Info

Publication number
JPS51101783A
JPS51101783A JP2606175A JP2606175A JPS51101783A JP S51101783 A JPS51101783 A JP S51101783A JP 2606175 A JP2606175 A JP 2606175A JP 2606175 A JP2606175 A JP 2606175A JP S51101783 A JPS51101783 A JP S51101783A
Authority
JP
Japan
Prior art keywords
shinkushorisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2606175A
Other languages
Japanese (ja)
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP2606175A priority Critical patent/JPS51101783A/en
Publication of JPS51101783A publication Critical patent/JPS51101783A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2606175A 1975-03-05 1975-03-05 SHINKUSHORISOCHI Pending JPS51101783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2606175A JPS51101783A (en) 1975-03-05 1975-03-05 SHINKUSHORISOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2606175A JPS51101783A (en) 1975-03-05 1975-03-05 SHINKUSHORISOCHI

Publications (1)

Publication Number Publication Date
JPS51101783A true JPS51101783A (en) 1976-09-08

Family

ID=12183158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2606175A Pending JPS51101783A (en) 1975-03-05 1975-03-05 SHINKUSHORISOCHI

Country Status (1)

Country Link
JP (1) JPS51101783A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238131A (en) * 1984-05-14 1985-11-27 Tokuda Seisakusho Ltd Vacuum treatment apparatus
JPH01288327A (en) * 1988-05-13 1989-11-20 Ulvac Corp Vacuum processing apparatus
JPH05315288A (en) * 1991-09-06 1993-11-26 Hitachi Ltd Low temperature dry etching equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238131A (en) * 1984-05-14 1985-11-27 Tokuda Seisakusho Ltd Vacuum treatment apparatus
JPH01288327A (en) * 1988-05-13 1989-11-20 Ulvac Corp Vacuum processing apparatus
JPH05315288A (en) * 1991-09-06 1993-11-26 Hitachi Ltd Low temperature dry etching equipment

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