JPS51111073A - Fine pattern forming - Google Patents

Fine pattern forming

Info

Publication number
JPS51111073A
JPS51111073A JP50035580A JP3558075A JPS51111073A JP S51111073 A JPS51111073 A JP S51111073A JP 50035580 A JP50035580 A JP 50035580A JP 3558075 A JP3558075 A JP 3558075A JP S51111073 A JPS51111073 A JP S51111073A
Authority
JP
Japan
Prior art keywords
pattern forming
fine pattern
light
standing wave
processing accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50035580A
Other languages
Japanese (ja)
Inventor
Michiharu Nakamura
Kunio Aiki
Shigeo Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50035580A priority Critical patent/JPS51111073A/en
Publication of JPS51111073A publication Critical patent/JPS51111073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: In fine pattern forming, to prevent reduction in processing accuracy caused by the standing wave of the light in the photo resistor.
COPYRIGHT: (C)1976,JPO&Japio
JP50035580A 1975-03-26 1975-03-26 Fine pattern forming Pending JPS51111073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50035580A JPS51111073A (en) 1975-03-26 1975-03-26 Fine pattern forming

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50035580A JPS51111073A (en) 1975-03-26 1975-03-26 Fine pattern forming

Publications (1)

Publication Number Publication Date
JPS51111073A true JPS51111073A (en) 1976-10-01

Family

ID=12445695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035580A Pending JPS51111073A (en) 1975-03-26 1975-03-26 Fine pattern forming

Country Status (1)

Country Link
JP (1) JPS51111073A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5679428A (en) * 1979-12-03 1981-06-30 Hitachi Ltd Working of ultra-fine article
JPS57172735A (en) * 1981-03-30 1982-10-23 Yokogawa Hewlett Packard Ltd Multilayer photoresist processing
JPS5892223A (en) * 1981-11-27 1983-06-01 Matsushita Electronics Corp Resist pattern formation
JPS5895383U (en) * 1981-12-22 1983-06-28 ヤンマー農機株式会社 Crawler position confirmation device for agricultural machines equipped with endless track belts
JPS58154285A (en) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol Manufacture of diffraction grating

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5679428A (en) * 1979-12-03 1981-06-30 Hitachi Ltd Working of ultra-fine article
JPS57172735A (en) * 1981-03-30 1982-10-23 Yokogawa Hewlett Packard Ltd Multilayer photoresist processing
JPS5892223A (en) * 1981-11-27 1983-06-01 Matsushita Electronics Corp Resist pattern formation
JPS5895383U (en) * 1981-12-22 1983-06-28 ヤンマー農機株式会社 Crawler position confirmation device for agricultural machines equipped with endless track belts
JPS58154285A (en) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol Manufacture of diffraction grating

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