JPS51112180A - Method for formation of the silcon oxide coated film - Google Patents

Method for formation of the silcon oxide coated film

Info

Publication number
JPS51112180A
JPS51112180A JP3654575A JP3654575A JPS51112180A JP S51112180 A JPS51112180 A JP S51112180A JP 3654575 A JP3654575 A JP 3654575A JP 3654575 A JP3654575 A JP 3654575A JP S51112180 A JPS51112180 A JP S51112180A
Authority
JP
Japan
Prior art keywords
formation
coated film
oxide coated
silcon
silcon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3654575A
Other languages
Japanese (ja)
Inventor
Hideo Sei
Hiroshi Sakai
Akira Shimohashi
Soichi Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3654575A priority Critical patent/JPS51112180A/en
Publication of JPS51112180A publication Critical patent/JPS51112180A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To form on the surface of silcon the quality film of the sufficiently low surface density.
JP3654575A 1975-03-28 1975-03-28 Method for formation of the silcon oxide coated film Pending JPS51112180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3654575A JPS51112180A (en) 1975-03-28 1975-03-28 Method for formation of the silcon oxide coated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3654575A JPS51112180A (en) 1975-03-28 1975-03-28 Method for formation of the silcon oxide coated film

Publications (1)

Publication Number Publication Date
JPS51112180A true JPS51112180A (en) 1976-10-04

Family

ID=12472729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3654575A Pending JPS51112180A (en) 1975-03-28 1975-03-28 Method for formation of the silcon oxide coated film

Country Status (1)

Country Link
JP (1) JPS51112180A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62166567A (en) * 1986-01-20 1987-07-23 Fujitsu Ltd Manufacture of semiconductor device
JPH0837183A (en) * 1995-01-19 1996-02-06 Semiconductor Energy Lab Co Ltd Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62166567A (en) * 1986-01-20 1987-07-23 Fujitsu Ltd Manufacture of semiconductor device
JPH0837183A (en) * 1995-01-19 1996-02-06 Semiconductor Energy Lab Co Ltd Semiconductor device

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