JPS51112441A - Ionization plating device - Google Patents

Ionization plating device

Info

Publication number
JPS51112441A
JPS51112441A JP50036599A JP3659975A JPS51112441A JP S51112441 A JPS51112441 A JP S51112441A JP 50036599 A JP50036599 A JP 50036599A JP 3659975 A JP3659975 A JP 3659975A JP S51112441 A JPS51112441 A JP S51112441A
Authority
JP
Japan
Prior art keywords
plating device
ionization plating
ionization
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50036599A
Other languages
Japanese (ja)
Other versions
JPS589156B2 (en
Inventor
Yasuhiro Shimizu
Kouichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50036599A priority Critical patent/JPS589156B2/en
Publication of JPS51112441A publication Critical patent/JPS51112441A/en
Publication of JPS589156B2 publication Critical patent/JPS589156B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP50036599A 1975-03-28 1975-03-28 Ionization plating device Expired JPS589156B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50036599A JPS589156B2 (en) 1975-03-28 1975-03-28 Ionization plating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50036599A JPS589156B2 (en) 1975-03-28 1975-03-28 Ionization plating device

Publications (2)

Publication Number Publication Date
JPS51112441A true JPS51112441A (en) 1976-10-04
JPS589156B2 JPS589156B2 (en) 1983-02-19

Family

ID=12474243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50036599A Expired JPS589156B2 (en) 1975-03-28 1975-03-28 Ionization plating device

Country Status (1)

Country Link
JP (1) JPS589156B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996261A (en) * 1982-11-22 1984-06-02 Agency Of Ind Science & Technol Thin film forming device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4954235A (en) * 1972-09-27 1974-05-27
JPS4955573A (en) * 1972-10-03 1974-05-29
JPS4961031A (en) * 1972-10-17 1974-06-13
JPS5520743U (en) * 1978-07-28 1980-02-09

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4954235A (en) * 1972-09-27 1974-05-27
JPS4955573A (en) * 1972-10-03 1974-05-29
JPS4961031A (en) * 1972-10-17 1974-06-13
JPS5520743U (en) * 1978-07-28 1980-02-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996261A (en) * 1982-11-22 1984-06-02 Agency Of Ind Science & Technol Thin film forming device

Also Published As

Publication number Publication date
JPS589156B2 (en) 1983-02-19

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