JPS51112605A - Base exposure method - Google Patents

Base exposure method

Info

Publication number
JPS51112605A
JPS51112605A JP50036804A JP3680475A JPS51112605A JP S51112605 A JPS51112605 A JP S51112605A JP 50036804 A JP50036804 A JP 50036804A JP 3680475 A JP3680475 A JP 3680475A JP S51112605 A JPS51112605 A JP S51112605A
Authority
JP
Japan
Prior art keywords
exposure method
base exposure
base
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50036804A
Other languages
Japanese (ja)
Inventor
Hiroaki Aiba
Toshiie Matsui
Osamu Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Priority to JP50036804A priority Critical patent/JPS51112605A/en
Publication of JPS51112605A publication Critical patent/JPS51112605A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50036804A 1975-03-28 1975-03-28 Base exposure method Pending JPS51112605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50036804A JPS51112605A (en) 1975-03-28 1975-03-28 Base exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50036804A JPS51112605A (en) 1975-03-28 1975-03-28 Base exposure method

Publications (1)

Publication Number Publication Date
JPS51112605A true JPS51112605A (en) 1976-10-05

Family

ID=12479960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50036804A Pending JPS51112605A (en) 1975-03-28 1975-03-28 Base exposure method

Country Status (1)

Country Link
JP (1) JPS51112605A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913445A (en) * 1972-06-01 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913445A (en) * 1972-06-01 1974-02-05

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