JPS51113458A - Wafer stretching device - Google Patents

Wafer stretching device

Info

Publication number
JPS51113458A
JPS51113458A JP3697175A JP3697175A JPS51113458A JP S51113458 A JPS51113458 A JP S51113458A JP 3697175 A JP3697175 A JP 3697175A JP 3697175 A JP3697175 A JP 3697175A JP S51113458 A JPS51113458 A JP S51113458A
Authority
JP
Japan
Prior art keywords
stretching device
wafer
wafer stretching
keep
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3697175A
Other languages
Japanese (ja)
Inventor
Toshio Tsuboya
Hisashi Yoshida
Masaru Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3697175A priority Critical patent/JPS51113458A/en
Publication of JPS51113458A publication Critical patent/JPS51113458A/en
Pending legal-status Critical Current

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  • Dicing (AREA)

Abstract

PURPOSE: To keep the distance between two adjacent pellets constant in any direction when a silicon wafer is divided into pellet elements.
COPYRIGHT: (C)1976,JPO&Japio
JP3697175A 1975-03-28 1975-03-28 Wafer stretching device Pending JPS51113458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3697175A JPS51113458A (en) 1975-03-28 1975-03-28 Wafer stretching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3697175A JPS51113458A (en) 1975-03-28 1975-03-28 Wafer stretching device

Publications (1)

Publication Number Publication Date
JPS51113458A true JPS51113458A (en) 1976-10-06

Family

ID=12484618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3697175A Pending JPS51113458A (en) 1975-03-28 1975-03-28 Wafer stretching device

Country Status (1)

Country Link
JP (1) JPS51113458A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294470A (en) * 2004-03-31 2005-10-20 Disco Abrasive Syst Ltd Tape expansion unit
US7789946B2 (en) 1997-11-21 2010-09-07 Jlj Medical Devices International, Inc. Smoke evacuation system
JP2016081977A (en) * 2014-10-10 2016-05-16 リンテック株式会社 Adhesive sheet for separation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7789946B2 (en) 1997-11-21 2010-09-07 Jlj Medical Devices International, Inc. Smoke evacuation system
US7959698B2 (en) 1997-11-21 2011-06-14 Coopersurgical, Inc. Smoke evacuation system
JP2005294470A (en) * 2004-03-31 2005-10-20 Disco Abrasive Syst Ltd Tape expansion unit
JP2016081977A (en) * 2014-10-10 2016-05-16 リンテック株式会社 Adhesive sheet for separation

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