JPS51113573A - Method of and apparatus for centering on plane by use of cntering mark - Google Patents

Method of and apparatus for centering on plane by use of cntering mark

Info

Publication number
JPS51113573A
JPS51113573A JP51026963A JP2696376A JPS51113573A JP S51113573 A JPS51113573 A JP S51113573A JP 51026963 A JP51026963 A JP 51026963A JP 2696376 A JP2696376 A JP 2696376A JP S51113573 A JPS51113573 A JP S51113573A
Authority
JP
Japan
Prior art keywords
cntering
centering
mark
plane
cntering mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51026963A
Other languages
Japanese (ja)
Inventor
Marushin Uoyushiku Zubigunieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polska Akademia Nauk Instytut
Original Assignee
Polska Akademia Nauk Instytut
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polska Akademia Nauk Instytut filed Critical Polska Akademia Nauk Instytut
Publication of JPS51113573A publication Critical patent/JPS51113573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP51026963A 1975-03-12 1976-03-12 Method of and apparatus for centering on plane by use of cntering mark Pending JPS51113573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL17871975 1975-03-12

Publications (1)

Publication Number Publication Date
JPS51113573A true JPS51113573A (en) 1976-10-06

Family

ID=19971260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51026963A Pending JPS51113573A (en) 1975-03-12 1976-03-12 Method of and apparatus for centering on plane by use of cntering mark

Country Status (1)

Country Link
JP (1) JPS51113573A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100533A (en) * 1982-11-30 1984-06-09 Canon Inc Location detector
JPS59100534A (en) * 1982-11-30 1984-06-09 Canon Inc Location detecting process
JPS63123299A (en) * 1986-11-12 1988-05-27 Nec Corp Manufacture for electroacoustic transducing device
JPS63197953A (en) * 1987-02-10 1988-08-16 Orc Mfg Co Ltd Automatic positioning method for mask film and work substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100533A (en) * 1982-11-30 1984-06-09 Canon Inc Location detector
JPS59100534A (en) * 1982-11-30 1984-06-09 Canon Inc Location detecting process
JPS63123299A (en) * 1986-11-12 1988-05-27 Nec Corp Manufacture for electroacoustic transducing device
JPS63197953A (en) * 1987-02-10 1988-08-16 Orc Mfg Co Ltd Automatic positioning method for mask film and work substrate

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