JPS51113596A - Lasar-processing apparatus - Google Patents

Lasar-processing apparatus

Info

Publication number
JPS51113596A
JPS51113596A JP50038037A JP3803775A JPS51113596A JP S51113596 A JPS51113596 A JP S51113596A JP 50038037 A JP50038037 A JP 50038037A JP 3803775 A JP3803775 A JP 3803775A JP S51113596 A JPS51113596 A JP S51113596A
Authority
JP
Japan
Prior art keywords
lasar
processing apparatus
processing
observation
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50038037A
Other languages
English (en)
Inventor
Osami Asai
Takeoki Miyauchi
Junichi Nakabayashi
Ukyo Mikoshiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50038037A priority Critical patent/JPS51113596A/ja
Publication of JPS51113596A publication Critical patent/JPS51113596A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP50038037A 1975-03-31 1975-03-31 Lasar-processing apparatus Pending JPS51113596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50038037A JPS51113596A (en) 1975-03-31 1975-03-31 Lasar-processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50038037A JPS51113596A (en) 1975-03-31 1975-03-31 Lasar-processing apparatus

Publications (1)

Publication Number Publication Date
JPS51113596A true JPS51113596A (en) 1976-10-06

Family

ID=12514326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50038037A Pending JPS51113596A (en) 1975-03-31 1975-03-31 Lasar-processing apparatus

Country Status (1)

Country Link
JP (1) JPS51113596A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135809A (ja) * 1983-12-26 1985-07-19 Tokyo Optical Co Ltd 欠陥検査装置
JP2006147817A (ja) * 2004-11-19 2006-06-08 Canon Inc レーザ加工装置およびレーザ加工方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135809A (ja) * 1983-12-26 1985-07-19 Tokyo Optical Co Ltd 欠陥検査装置
JP2006147817A (ja) * 2004-11-19 2006-06-08 Canon Inc レーザ加工装置およびレーザ加工方法
US7807940B2 (en) 2004-11-19 2010-10-05 Canon Kabushiki Kaisha Laser processing apparatus and laser processing method

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