JPS51114087A - Semiconductor - Google Patents

Semiconductor

Info

Publication number
JPS51114087A
JPS51114087A JP3896775A JP3896775A JPS51114087A JP S51114087 A JPS51114087 A JP S51114087A JP 3896775 A JP3896775 A JP 3896775A JP 3896775 A JP3896775 A JP 3896775A JP S51114087 A JPS51114087 A JP S51114087A
Authority
JP
Japan
Prior art keywords
reducing
semiconductor
chances
wires
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3896775A
Other languages
Japanese (ja)
Inventor
Shigeharu Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3896775A priority Critical patent/JPS51114087A/en
Publication of JPS51114087A publication Critical patent/JPS51114087A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

PURPOSE: Reducing the mutual distance between wires in multilayer wiring without reducing the size of the contact holes and giving rise to semiconductors free from chances of wire snapping.
COPYRIGHT: (C)1976,JPO&Japio
JP3896775A 1975-03-31 1975-03-31 Semiconductor Pending JPS51114087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3896775A JPS51114087A (en) 1975-03-31 1975-03-31 Semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3896775A JPS51114087A (en) 1975-03-31 1975-03-31 Semiconductor

Publications (1)

Publication Number Publication Date
JPS51114087A true JPS51114087A (en) 1976-10-07

Family

ID=12539919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3896775A Pending JPS51114087A (en) 1975-03-31 1975-03-31 Semiconductor

Country Status (1)

Country Link
JP (1) JPS51114087A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125929A (en) * 1987-11-11 1989-05-18 Toshiba Corp Pattern formation of photoresist

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502882A (en) * 1973-02-28 1975-01-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502882A (en) * 1973-02-28 1975-01-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125929A (en) * 1987-11-11 1989-05-18 Toshiba Corp Pattern formation of photoresist

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