JPS51114090A - Metal-oxide membrane-semiconductor voltage senser element - Google Patents

Metal-oxide membrane-semiconductor voltage senser element

Info

Publication number
JPS51114090A
JPS51114090A JP3848175A JP3848175A JPS51114090A JP S51114090 A JPS51114090 A JP S51114090A JP 3848175 A JP3848175 A JP 3848175A JP 3848175 A JP3848175 A JP 3848175A JP S51114090 A JPS51114090 A JP S51114090A
Authority
JP
Japan
Prior art keywords
metal
senser element
oxide membrane
semiconductor voltage
voltage senser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3848175A
Other languages
Japanese (ja)
Inventor
Yasumasa Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO DENKI DAIGAKU
Original Assignee
TOKYO DENKI DAIGAKU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO DENKI DAIGAKU filed Critical TOKYO DENKI DAIGAKU
Priority to JP3848175A priority Critical patent/JPS51114090A/en
Publication of JPS51114090A publication Critical patent/JPS51114090A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: MOS based voltage senser element utilizing the variation in voltage-current or voltage-capacity characteristics resultant upon externally applied stress.
COPYRIGHT: (C)1976,JPO&Japio
JP3848175A 1975-04-01 1975-04-01 Metal-oxide membrane-semiconductor voltage senser element Pending JPS51114090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3848175A JPS51114090A (en) 1975-04-01 1975-04-01 Metal-oxide membrane-semiconductor voltage senser element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3848175A JPS51114090A (en) 1975-04-01 1975-04-01 Metal-oxide membrane-semiconductor voltage senser element

Publications (1)

Publication Number Publication Date
JPS51114090A true JPS51114090A (en) 1976-10-07

Family

ID=12526435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3848175A Pending JPS51114090A (en) 1975-04-01 1975-04-01 Metal-oxide membrane-semiconductor voltage senser element

Country Status (1)

Country Link
JP (1) JPS51114090A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219844A (en) * 1985-03-26 1986-09-30 Agency Of Ind Science & Technol Force sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497998A (en) * 1972-05-23 1974-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497998A (en) * 1972-05-23 1974-01-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219844A (en) * 1985-03-26 1986-09-30 Agency Of Ind Science & Technol Force sensor

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