JPS51114739A - Heating table - Google Patents

Heating table

Info

Publication number
JPS51114739A
JPS51114739A JP3909075A JP3909075A JPS51114739A JP S51114739 A JPS51114739 A JP S51114739A JP 3909075 A JP3909075 A JP 3909075A JP 3909075 A JP3909075 A JP 3909075A JP S51114739 A JPS51114739 A JP S51114739A
Authority
JP
Japan
Prior art keywords
heating table
pellet
assembling
installation
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3909075A
Other languages
Japanese (ja)
Inventor
Masuzo Ikumi
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3909075A priority Critical patent/JPS51114739A/en
Publication of JPS51114739A publication Critical patent/JPS51114739A/en
Pending legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE: To control a temperature drop freely upon installation of a pellet in a heating table used especially for assembling a semiconductor device.
COPYRIGHT: (C)1976,JPO&Japio
JP3909075A 1975-04-02 1975-04-02 Heating table Pending JPS51114739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3909075A JPS51114739A (en) 1975-04-02 1975-04-02 Heating table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3909075A JPS51114739A (en) 1975-04-02 1975-04-02 Heating table

Publications (1)

Publication Number Publication Date
JPS51114739A true JPS51114739A (en) 1976-10-08

Family

ID=12543365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3909075A Pending JPS51114739A (en) 1975-04-02 1975-04-02 Heating table

Country Status (1)

Country Link
JP (1) JPS51114739A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252334U (en) * 1988-10-05 1990-04-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252334U (en) * 1988-10-05 1990-04-16

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