JPS51117985A - An apparatus for coating hollow tubes - Google Patents

An apparatus for coating hollow tubes

Info

Publication number
JPS51117985A
JPS51117985A JP4285675A JP4285675A JPS51117985A JP S51117985 A JPS51117985 A JP S51117985A JP 4285675 A JP4285675 A JP 4285675A JP 4285675 A JP4285675 A JP 4285675A JP S51117985 A JPS51117985 A JP S51117985A
Authority
JP
Japan
Prior art keywords
hollow tubes
coating hollow
coating
electroconductive
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4285675A
Other languages
Japanese (ja)
Other versions
JPS5538030B2 (en
Inventor
Hideomi Takahashi
Toshio Miyaki
Kyoji Kinokiri
Noboru Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4285675A priority Critical patent/JPS51117985A/en
Publication of JPS51117985A publication Critical patent/JPS51117985A/en
Publication of JPS5538030B2 publication Critical patent/JPS5538030B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A coating apparatus for forming an electroconductive or insulating film on the inner surface of a hollow tube.
JP4285675A 1975-04-10 1975-04-10 An apparatus for coating hollow tubes Granted JPS51117985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4285675A JPS51117985A (en) 1975-04-10 1975-04-10 An apparatus for coating hollow tubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4285675A JPS51117985A (en) 1975-04-10 1975-04-10 An apparatus for coating hollow tubes

Publications (2)

Publication Number Publication Date
JPS51117985A true JPS51117985A (en) 1976-10-16
JPS5538030B2 JPS5538030B2 (en) 1980-10-01

Family

ID=12647651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4285675A Granted JPS51117985A (en) 1975-04-10 1975-04-10 An apparatus for coating hollow tubes

Country Status (1)

Country Link
JP (1) JPS51117985A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945849A (en) * 1972-09-08 1974-05-01
JPS5016120U (en) * 1973-06-13 1975-02-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945849A (en) * 1972-09-08 1974-05-01
JPS5016120U (en) * 1973-06-13 1975-02-20

Also Published As

Publication number Publication date
JPS5538030B2 (en) 1980-10-01

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