JPS51118374A - Manufacturing process for oxidized silicon film - Google Patents

Manufacturing process for oxidized silicon film

Info

Publication number
JPS51118374A
JPS51118374A JP50043708A JP4370875A JPS51118374A JP S51118374 A JPS51118374 A JP S51118374A JP 50043708 A JP50043708 A JP 50043708A JP 4370875 A JP4370875 A JP 4370875A JP S51118374 A JPS51118374 A JP S51118374A
Authority
JP
Japan
Prior art keywords
manufacturing process
silicon film
oxidized silicon
oxidized
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50043708A
Other languages
Japanese (ja)
Inventor
Masayoshi Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd, Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP50043708A priority Critical patent/JPS51118374A/en
Publication of JPS51118374A publication Critical patent/JPS51118374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: Manufacturing process for oxidized silicon film with high purity.
COPYRIGHT: (C)1976,JPO&Japio
JP50043708A 1975-04-10 1975-04-10 Manufacturing process for oxidized silicon film Pending JPS51118374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50043708A JPS51118374A (en) 1975-04-10 1975-04-10 Manufacturing process for oxidized silicon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043708A JPS51118374A (en) 1975-04-10 1975-04-10 Manufacturing process for oxidized silicon film

Publications (1)

Publication Number Publication Date
JPS51118374A true JPS51118374A (en) 1976-10-18

Family

ID=12671299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043708A Pending JPS51118374A (en) 1975-04-10 1975-04-10 Manufacturing process for oxidized silicon film

Country Status (1)

Country Link
JP (1) JPS51118374A (en)

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