JPS511187A - Gasubunsekisochi - Google Patents

Gasubunsekisochi

Info

Publication number
JPS511187A
JPS511187A JP7131874A JP7131874A JPS511187A JP S511187 A JPS511187 A JP S511187A JP 7131874 A JP7131874 A JP 7131874A JP 7131874 A JP7131874 A JP 7131874A JP S511187 A JPS511187 A JP S511187A
Authority
JP
Japan
Prior art keywords
kisochi
gasubunse
gasubunse kisochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7131874A
Other languages
English (en)
Inventor
Teruaki Motooka
Katsumi Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7131874A priority Critical patent/JPS511187A/ja
Publication of JPS511187A publication Critical patent/JPS511187A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP7131874A 1974-06-24 1974-06-24 Gasubunsekisochi Pending JPS511187A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7131874A JPS511187A (ja) 1974-06-24 1974-06-24 Gasubunsekisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7131874A JPS511187A (ja) 1974-06-24 1974-06-24 Gasubunsekisochi

Publications (1)

Publication Number Publication Date
JPS511187A true JPS511187A (ja) 1976-01-07

Family

ID=13457104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7131874A Pending JPS511187A (ja) 1974-06-24 1974-06-24 Gasubunsekisochi

Country Status (1)

Country Link
JP (1) JPS511187A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211135A (ja) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd 透明試料板の表面検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211135A (ja) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd 透明試料板の表面検査装置

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