JPS51130927A - High vacuum valve device - Google Patents

High vacuum valve device

Info

Publication number
JPS51130927A
JPS51130927A JP5458675A JP5458675A JPS51130927A JP S51130927 A JPS51130927 A JP S51130927A JP 5458675 A JP5458675 A JP 5458675A JP 5458675 A JP5458675 A JP 5458675A JP S51130927 A JPS51130927 A JP S51130927A
Authority
JP
Japan
Prior art keywords
valve device
high vacuum
vacuum valve
valve
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5458675A
Other languages
Japanese (ja)
Inventor
Masakado Ootaka
Tai Nakaizumi
Yoshio Kamaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5458675A priority Critical patent/JPS51130927A/en
Publication of JPS51130927A publication Critical patent/JPS51130927A/en
Pending legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP5458675A 1975-05-12 1975-05-12 High vacuum valve device Pending JPS51130927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5458675A JPS51130927A (en) 1975-05-12 1975-05-12 High vacuum valve device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5458675A JPS51130927A (en) 1975-05-12 1975-05-12 High vacuum valve device

Publications (1)

Publication Number Publication Date
JPS51130927A true JPS51130927A (en) 1976-11-13

Family

ID=12974806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5458675A Pending JPS51130927A (en) 1975-05-12 1975-05-12 High vacuum valve device

Country Status (1)

Country Link
JP (1) JPS51130927A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937230A (en) * 1972-08-10 1974-04-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937230A (en) * 1972-08-10 1974-04-06

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