JPS5113406A - Sukuizushikihonpuyohonpinguchuubu - Google Patents

Sukuizushikihonpuyohonpinguchuubu

Info

Publication number
JPS5113406A
JPS5113406A JP8497274A JP8497274A JPS5113406A JP S5113406 A JPS5113406 A JP S5113406A JP 8497274 A JP8497274 A JP 8497274A JP 8497274 A JP8497274 A JP 8497274A JP S5113406 A JPS5113406 A JP S5113406A
Authority
JP
Japan
Prior art keywords
sukuizushikihonpuyohonpinguchuubu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8497274A
Other languages
English (en)
Inventor
Keiji Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shin Meiva Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Meiva Industry Ltd filed Critical Shin Meiva Industry Ltd
Priority to JP8497274A priority Critical patent/JPS5113406A/ja
Publication of JPS5113406A publication Critical patent/JPS5113406A/ja
Pending legal-status Critical Current

Links

JP8497274A 1974-07-23 1974-07-23 Sukuizushikihonpuyohonpinguchuubu Pending JPS5113406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8497274A JPS5113406A (ja) 1974-07-23 1974-07-23 Sukuizushikihonpuyohonpinguchuubu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8497274A JPS5113406A (ja) 1974-07-23 1974-07-23 Sukuizushikihonpuyohonpinguchuubu

Publications (1)

Publication Number Publication Date
JPS5113406A true JPS5113406A (ja) 1976-02-02

Family

ID=13845528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8497274A Pending JPS5113406A (ja) 1974-07-23 1974-07-23 Sukuizushikihonpuyohonpinguchuubu

Country Status (1)

Country Link
JP (1) JPS5113406A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020128723A (ja) * 2019-02-08 2020-08-27 東京エレクトロン株式会社 チューブ体及びポンプ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482124A (ja) * 1971-05-21 1973-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS482124A (ja) * 1971-05-21 1973-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020128723A (ja) * 2019-02-08 2020-08-27 東京エレクトロン株式会社 チューブ体及びポンプ装置

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