JPS5113572A - TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO - Google Patents

TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO

Info

Publication number
JPS5113572A
JPS5113572A JP8418474A JP8418474A JPS5113572A JP S5113572 A JPS5113572 A JP S5113572A JP 8418474 A JP8418474 A JP 8418474A JP 8418474 A JP8418474 A JP 8418474A JP S5113572 A JPS5113572 A JP S5113572A
Authority
JP
Japan
Prior art keywords
taketsushohandotaimakuno
seizohoho
taketsushohandotaimakuno seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8418474A
Other languages
Japanese (ja)
Inventor
Sunao Matsubara
Tadashi Saito
Shigekazu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8418474A priority Critical patent/JPS5113572A/en
Publication of JPS5113572A publication Critical patent/JPS5113572A/en
Pending legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP8418474A 1974-07-24 1974-07-24 TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO Pending JPS5113572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8418474A JPS5113572A (en) 1974-07-24 1974-07-24 TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8418474A JPS5113572A (en) 1974-07-24 1974-07-24 TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO

Publications (1)

Publication Number Publication Date
JPS5113572A true JPS5113572A (en) 1976-02-03

Family

ID=13823381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8418474A Pending JPS5113572A (en) 1974-07-24 1974-07-24 TAKETSUSHOHANDOTAIMAKUNO SEIZOHOHO

Country Status (1)

Country Link
JP (1) JPS5113572A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009155112A (en) * 2007-12-25 2009-07-16 Panasonic Electric Works Co Ltd Manufacturing method of polycrystalline thin film, manufacturing method of composite nanocrystal layer, field emission electron source, light emitting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009155112A (en) * 2007-12-25 2009-07-16 Panasonic Electric Works Co Ltd Manufacturing method of polycrystalline thin film, manufacturing method of composite nanocrystal layer, field emission electron source, light emitting device

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