JPS51136278A - Non-spot aberration compensator for electron microscope having electri c field radiation gun - Google Patents

Non-spot aberration compensator for electron microscope having electri c field radiation gun

Info

Publication number
JPS51136278A
JPS51136278A JP50059642A JP5964275A JPS51136278A JP S51136278 A JPS51136278 A JP S51136278A JP 50059642 A JP50059642 A JP 50059642A JP 5964275 A JP5964275 A JP 5964275A JP S51136278 A JPS51136278 A JP S51136278A
Authority
JP
Japan
Prior art keywords
electri
electron microscope
aberration compensator
field radiation
radiation gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50059642A
Other languages
Japanese (ja)
Inventor
Akimitsu Okura
Shigeru Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50059642A priority Critical patent/JPS51136278A/en
Publication of JPS51136278A publication Critical patent/JPS51136278A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: Non-spot aberration compensator for electron micro scope with easy aberration compensator and super high resolution provided.
COPYRIGHT: (C)1976,JPO&Japio
JP50059642A 1975-05-21 1975-05-21 Non-spot aberration compensator for electron microscope having electri c field radiation gun Pending JPS51136278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50059642A JPS51136278A (en) 1975-05-21 1975-05-21 Non-spot aberration compensator for electron microscope having electri c field radiation gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50059642A JPS51136278A (en) 1975-05-21 1975-05-21 Non-spot aberration compensator for electron microscope having electri c field radiation gun

Publications (1)

Publication Number Publication Date
JPS51136278A true JPS51136278A (en) 1976-11-25

Family

ID=13119065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50059642A Pending JPS51136278A (en) 1975-05-21 1975-05-21 Non-spot aberration compensator for electron microscope having electri c field radiation gun

Country Status (1)

Country Link
JP (1) JPS51136278A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294746A (en) * 1985-06-24 1986-12-25 Hitachi Ltd Scanning type electron microscope
JPS63318048A (en) * 1987-06-19 1988-12-26 Jeol Ltd Electron microscope using field emission type electron gun and superhigh-sensitivity recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (en) * 1971-09-06 1973-05-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (en) * 1971-09-06 1973-05-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294746A (en) * 1985-06-24 1986-12-25 Hitachi Ltd Scanning type electron microscope
JPS63318048A (en) * 1987-06-19 1988-12-26 Jeol Ltd Electron microscope using field emission type electron gun and superhigh-sensitivity recording medium

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