JPS511370A - - Google Patents

Info

Publication number
JPS511370A
JPS511370A JP49072157A JP7215774A JPS511370A JP S511370 A JPS511370 A JP S511370A JP 49072157 A JP49072157 A JP 49072157A JP 7215774 A JP7215774 A JP 7215774A JP S511370 A JPS511370 A JP S511370A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49072157A
Other languages
Japanese (ja)
Other versions
JPS5515258B2 (ko
Inventor
Iwao Seto
Seiichi Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Infilco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Infilco Co Ltd filed Critical Ebara Infilco Co Ltd
Priority to JP7215774A priority Critical patent/JPS5515258B2/ja
Publication of JPS511370A publication Critical patent/JPS511370A/ja
Publication of JPS5515258B2 publication Critical patent/JPS5515258B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Ion Exchange (AREA)
JP7215774A 1974-06-24 1974-06-24 Expired JPS5515258B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7215774A JPS5515258B2 (ko) 1974-06-24 1974-06-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7215774A JPS5515258B2 (ko) 1974-06-24 1974-06-24

Publications (2)

Publication Number Publication Date
JPS511370A true JPS511370A (ko) 1976-01-08
JPS5515258B2 JPS5515258B2 (ko) 1980-04-22

Family

ID=13481126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7215774A Expired JPS5515258B2 (ko) 1974-06-24 1974-06-24

Country Status (1)

Country Link
JP (1) JPS5515258B2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6665589B2 (ja) 2016-03-02 2020-03-13 オムロン株式会社 圧力センサチップ及び圧力センサ

Also Published As

Publication number Publication date
JPS5515258B2 (ko) 1980-04-22

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