JPS51137111A - Ion pump - Google Patents

Ion pump

Info

Publication number
JPS51137111A
JPS51137111A JP6096475A JP6096475A JPS51137111A JP S51137111 A JPS51137111 A JP S51137111A JP 6096475 A JP6096475 A JP 6096475A JP 6096475 A JP6096475 A JP 6096475A JP S51137111 A JPS51137111 A JP S51137111A
Authority
JP
Japan
Prior art keywords
ion pump
imtensity
chieving
devised
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6096475A
Other languages
English (en)
Inventor
Naotake Saito
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6096475A priority Critical patent/JPS51137111A/ja
Publication of JPS51137111A publication Critical patent/JPS51137111A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP6096475A 1975-05-23 1975-05-23 Ion pump Pending JPS51137111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6096475A JPS51137111A (en) 1975-05-23 1975-05-23 Ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6096475A JPS51137111A (en) 1975-05-23 1975-05-23 Ion pump

Publications (1)

Publication Number Publication Date
JPS51137111A true JPS51137111A (en) 1976-11-26

Family

ID=13157593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6096475A Pending JPS51137111A (en) 1975-05-23 1975-05-23 Ion pump

Country Status (1)

Country Link
JP (1) JPS51137111A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062050A (ja) * 1983-09-16 1985-04-10 Anelva Corp スパッタイオンポンプ電源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062050A (ja) * 1983-09-16 1985-04-10 Anelva Corp スパッタイオンポンプ電源

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