JPS51137486A - Sample point analysis position indicator - Google Patents

Sample point analysis position indicator

Info

Publication number
JPS51137486A
JPS51137486A JP50060975A JP6097575A JPS51137486A JP S51137486 A JPS51137486 A JP S51137486A JP 50060975 A JP50060975 A JP 50060975A JP 6097575 A JP6097575 A JP 6097575A JP S51137486 A JPS51137486 A JP S51137486A
Authority
JP
Japan
Prior art keywords
analysis position
point analysis
position indicator
sample point
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50060975A
Other languages
English (en)
Inventor
Fumio Mizuno
Hideyuki Kakiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50060975A priority Critical patent/JPS51137486A/ja
Publication of JPS51137486A publication Critical patent/JPS51137486A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP50060975A 1975-05-23 1975-05-23 Sample point analysis position indicator Pending JPS51137486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50060975A JPS51137486A (en) 1975-05-23 1975-05-23 Sample point analysis position indicator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50060975A JPS51137486A (en) 1975-05-23 1975-05-23 Sample point analysis position indicator

Publications (1)

Publication Number Publication Date
JPS51137486A true JPS51137486A (en) 1976-11-27

Family

ID=13157923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50060975A Pending JPS51137486A (en) 1975-05-23 1975-05-23 Sample point analysis position indicator

Country Status (1)

Country Link
JP (1) JPS51137486A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439575A (en) * 1977-09-05 1979-03-27 Jeol Ltd Electron ray unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4122320Y1 (ja) * 1966-05-26 1966-11-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4122320Y1 (ja) * 1966-05-26 1966-11-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439575A (en) * 1977-09-05 1979-03-27 Jeol Ltd Electron ray unit

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