JPS51137634A - Method of etching chromium oxide - Google Patents

Method of etching chromium oxide

Info

Publication number
JPS51137634A
JPS51137634A JP6216775A JP6216775A JPS51137634A JP S51137634 A JPS51137634 A JP S51137634A JP 6216775 A JP6216775 A JP 6216775A JP 6216775 A JP6216775 A JP 6216775A JP S51137634 A JPS51137634 A JP S51137634A
Authority
JP
Japan
Prior art keywords
chromium oxide
etching chromium
etching
oxide
chromium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6216775A
Other languages
Japanese (ja)
Inventor
Kiyuusaku Nishioka
Haruhiko Abe
Satoru Wada
Teruhiko Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6216775A priority Critical patent/JPS51137634A/en
Publication of JPS51137634A publication Critical patent/JPS51137634A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP6216775A 1975-05-23 1975-05-23 Method of etching chromium oxide Pending JPS51137634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6216775A JPS51137634A (en) 1975-05-23 1975-05-23 Method of etching chromium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6216775A JPS51137634A (en) 1975-05-23 1975-05-23 Method of etching chromium oxide

Publications (1)

Publication Number Publication Date
JPS51137634A true JPS51137634A (en) 1976-11-27

Family

ID=13192285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6216775A Pending JPS51137634A (en) 1975-05-23 1975-05-23 Method of etching chromium oxide

Country Status (1)

Country Link
JP (1) JPS51137634A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748235A (en) * 1980-07-24 1982-03-19 Fujitsu Ltd Manufacture of semiconductor device
JPS62145732A (en) * 1985-12-20 1987-06-29 Hitachi Ltd Etching

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748235A (en) * 1980-07-24 1982-03-19 Fujitsu Ltd Manufacture of semiconductor device
JPS62145732A (en) * 1985-12-20 1987-06-29 Hitachi Ltd Etching

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