JPS51137998A - Mechanochemical polishing of precision parts - Google Patents

Mechanochemical polishing of precision parts

Info

Publication number
JPS51137998A
JPS51137998A JP50062118A JP6211875A JPS51137998A JP S51137998 A JPS51137998 A JP S51137998A JP 50062118 A JP50062118 A JP 50062118A JP 6211875 A JP6211875 A JP 6211875A JP S51137998 A JPS51137998 A JP S51137998A
Authority
JP
Japan
Prior art keywords
precision parts
mechanochemical polishing
mechanochemical
polishing
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50062118A
Other languages
Japanese (ja)
Inventor
Matsunosuke Kikuchi
Sadami Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50062118A priority Critical patent/JPS51137998A/en
Publication of JPS51137998A publication Critical patent/JPS51137998A/en
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To make practicable surface treatment which gives a flat,mirroirfaced and flawless surface finish.
JP50062118A 1975-05-24 1975-05-24 Mechanochemical polishing of precision parts Pending JPS51137998A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50062118A JPS51137998A (en) 1975-05-24 1975-05-24 Mechanochemical polishing of precision parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50062118A JPS51137998A (en) 1975-05-24 1975-05-24 Mechanochemical polishing of precision parts

Publications (1)

Publication Number Publication Date
JPS51137998A true JPS51137998A (en) 1976-11-29

Family

ID=13190811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50062118A Pending JPS51137998A (en) 1975-05-24 1975-05-24 Mechanochemical polishing of precision parts

Country Status (1)

Country Link
JP (1) JPS51137998A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0234925A (en) * 1988-04-20 1990-02-05 Fujitsu Ltd Manufacture of semiconductor device
USRE37997E1 (en) 1990-01-22 2003-02-18 Micron Technology, Inc. Polishing pad with controlled abrasion rate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0234925A (en) * 1988-04-20 1990-02-05 Fujitsu Ltd Manufacture of semiconductor device
USRE37997E1 (en) 1990-01-22 2003-02-18 Micron Technology, Inc. Polishing pad with controlled abrasion rate

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