JPS51138379A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS51138379A
JPS51138379A JP50062001A JP6200175A JPS51138379A JP S51138379 A JPS51138379 A JP S51138379A JP 50062001 A JP50062001 A JP 50062001A JP 6200175 A JP6200175 A JP 6200175A JP S51138379 A JPS51138379 A JP S51138379A
Authority
JP
Japan
Prior art keywords
electron microscope
type electron
scanning type
decrease
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50062001A
Other languages
Japanese (ja)
Inventor
Hideo Todokoro
Yoshio Hokotani
Tadashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50062001A priority Critical patent/JPS51138379A/en
Publication of JPS51138379A publication Critical patent/JPS51138379A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the decrease in the magnetic field and scattered electron beam caused by eddy current by the use of metal bellows as a partition wall between a scanning coil and an electron passage.
COPYRIGHT: (C)1976,JPO&Japio
JP50062001A 1975-05-26 1975-05-26 Scanning type electron microscope Pending JPS51138379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50062001A JPS51138379A (en) 1975-05-26 1975-05-26 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50062001A JPS51138379A (en) 1975-05-26 1975-05-26 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS51138379A true JPS51138379A (en) 1976-11-29

Family

ID=13187469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50062001A Pending JPS51138379A (en) 1975-05-26 1975-05-26 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS51138379A (en)

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