JPS51138977A - A drive mechanism - Google Patents

A drive mechanism

Info

Publication number
JPS51138977A
JPS51138977A JP50062878A JP6287875A JPS51138977A JP S51138977 A JPS51138977 A JP S51138977A JP 50062878 A JP50062878 A JP 50062878A JP 6287875 A JP6287875 A JP 6287875A JP S51138977 A JPS51138977 A JP S51138977A
Authority
JP
Japan
Prior art keywords
drive mechanism
neable
remarkably high
stably drive
drive object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50062878A
Other languages
Japanese (ja)
Other versions
JPS5832496B2 (en
Inventor
Osamu Morita
Shigeo Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50062878A priority Critical patent/JPS5832496B2/en
Publication of JPS51138977A publication Critical patent/JPS51138977A/en
Publication of JPS5832496B2 publication Critical patent/JPS5832496B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To neable to stably drive object in a remarkably high exactness in an optional atmosphere.
COPYRIGHT: (C)1976,JPO&Japio
JP50062878A 1975-05-28 1975-05-28 Kudokikou Expired JPS5832496B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50062878A JPS5832496B2 (en) 1975-05-28 1975-05-28 Kudokikou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50062878A JPS5832496B2 (en) 1975-05-28 1975-05-28 Kudokikou

Publications (2)

Publication Number Publication Date
JPS51138977A true JPS51138977A (en) 1976-11-30
JPS5832496B2 JPS5832496B2 (en) 1983-07-13

Family

ID=13212953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50062878A Expired JPS5832496B2 (en) 1975-05-28 1975-05-28 Kudokikou

Country Status (1)

Country Link
JP (1) JPS5832496B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347524A (en) * 1989-07-17 1991-02-28 Nippon Telegr & Teleph Corp <Ntt> Apparatus for driving system in vacuum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347524A (en) * 1989-07-17 1991-02-28 Nippon Telegr & Teleph Corp <Ntt> Apparatus for driving system in vacuum

Also Published As

Publication number Publication date
JPS5832496B2 (en) 1983-07-13

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