JPS51140558A - Specimen table - Google Patents

Specimen table

Info

Publication number
JPS51140558A
JPS51140558A JP6430675A JP6430675A JPS51140558A JP S51140558 A JPS51140558 A JP S51140558A JP 6430675 A JP6430675 A JP 6430675A JP 6430675 A JP6430675 A JP 6430675A JP S51140558 A JPS51140558 A JP S51140558A
Authority
JP
Japan
Prior art keywords
specimen table
specimen
diffusion
insulating plate
mounted above
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6430675A
Other languages
Japanese (ja)
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6430675A priority Critical patent/JPS51140558A/en
Publication of JPS51140558A publication Critical patent/JPS51140558A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To provide a device of making uniform heat treatment (diffusion) by use of a specimen table mounted above a heat-insulating plate.
COPYRIGHT: (C)1976,JPO&Japio
JP6430675A 1975-05-30 1975-05-30 Specimen table Pending JPS51140558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6430675A JPS51140558A (en) 1975-05-30 1975-05-30 Specimen table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6430675A JPS51140558A (en) 1975-05-30 1975-05-30 Specimen table

Publications (1)

Publication Number Publication Date
JPS51140558A true JPS51140558A (en) 1976-12-03

Family

ID=13254419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6430675A Pending JPS51140558A (en) 1975-05-30 1975-05-30 Specimen table

Country Status (1)

Country Link
JP (1) JPS51140558A (en)

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