JPS51140573A - Photo-resist coating device - Google Patents

Photo-resist coating device

Info

Publication number
JPS51140573A
JPS51140573A JP50064307A JP6430775A JPS51140573A JP S51140573 A JPS51140573 A JP S51140573A JP 50064307 A JP50064307 A JP 50064307A JP 6430775 A JP6430775 A JP 6430775A JP S51140573 A JPS51140573 A JP S51140573A
Authority
JP
Japan
Prior art keywords
photo
coating device
resist coating
resist
effecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064307A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50064307A priority Critical patent/JPS51140573A/en
Publication of JPS51140573A publication Critical patent/JPS51140573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To provide a photo-resist coating device having a structure capable of effecting an uniform coat of photo-resist to the objective surface.
COPYRIGHT: (C)1976,JPO&Japio
JP50064307A 1975-05-30 1975-05-30 Photo-resist coating device Pending JPS51140573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064307A JPS51140573A (en) 1975-05-30 1975-05-30 Photo-resist coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064307A JPS51140573A (en) 1975-05-30 1975-05-30 Photo-resist coating device

Publications (1)

Publication Number Publication Date
JPS51140573A true JPS51140573A (en) 1976-12-03

Family

ID=13254443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064307A Pending JPS51140573A (en) 1975-05-30 1975-05-30 Photo-resist coating device

Country Status (1)

Country Link
JP (1) JPS51140573A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer

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