JPS51145207A - Electro beam recording system - Google Patents

Electro beam recording system

Info

Publication number
JPS51145207A
JPS51145207A JP50070049A JP7004975A JPS51145207A JP S51145207 A JPS51145207 A JP S51145207A JP 50070049 A JP50070049 A JP 50070049A JP 7004975 A JP7004975 A JP 7004975A JP S51145207 A JPS51145207 A JP S51145207A
Authority
JP
Japan
Prior art keywords
recording system
beam recording
electro beam
electro
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50070049A
Other languages
English (en)
Inventor
Masaru Ozaki
Koichi Mori
Junichi Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP50070049A priority Critical patent/JPS51145207A/ja
Publication of JPS51145207A publication Critical patent/JPS51145207A/ja
Pending legal-status Critical Current

Links

JP50070049A 1975-06-10 1975-06-10 Electro beam recording system Pending JPS51145207A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50070049A JPS51145207A (en) 1975-06-10 1975-06-10 Electro beam recording system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50070049A JPS51145207A (en) 1975-06-10 1975-06-10 Electro beam recording system

Publications (1)

Publication Number Publication Date
JPS51145207A true JPS51145207A (en) 1976-12-14

Family

ID=13420310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50070049A Pending JPS51145207A (en) 1975-06-10 1975-06-10 Electro beam recording system

Country Status (1)

Country Link
JP (1) JPS51145207A (ja)

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