JPS51145266A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS51145266A
JPS51145266A JP50069811A JP6981175A JPS51145266A JP S51145266 A JPS51145266 A JP S51145266A JP 50069811 A JP50069811 A JP 50069811A JP 6981175 A JP6981175 A JP 6981175A JP S51145266 A JPS51145266 A JP S51145266A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
anode
simplify
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50069811A
Other languages
Japanese (ja)
Inventor
Kazutoshi Nagano
Kosei Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50069811A priority Critical patent/JPS51145266A/en
Publication of JPS51145266A publication Critical patent/JPS51145266A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To simplify the processing by means of anodic oxidation or of polishing anode instead of using semiconductor basic body as anode directly.
COPYRIGHT: (C)1976,JPO&Japio
JP50069811A 1975-06-09 1975-06-09 Manufacture of semiconductor device Pending JPS51145266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50069811A JPS51145266A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50069811A JPS51145266A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51145266A true JPS51145266A (en) 1976-12-14

Family

ID=13413504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50069811A Pending JPS51145266A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51145266A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289819A (en) * 1987-05-21 1988-11-28 Nec Corp Wet etching equipment
JP2003045869A (en) * 2001-08-01 2003-02-14 Sony Corp Anodizing apparatus, method for forming porous layer using the same, and method for manufacturing semiconductor thin film
JP2023044128A (en) * 2021-09-17 2023-03-30 株式会社東芝 Etching apparatus and etching method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289819A (en) * 1987-05-21 1988-11-28 Nec Corp Wet etching equipment
JP2003045869A (en) * 2001-08-01 2003-02-14 Sony Corp Anodizing apparatus, method for forming porous layer using the same, and method for manufacturing semiconductor thin film
JP2023044128A (en) * 2021-09-17 2023-03-30 株式会社東芝 Etching apparatus and etching method
US12278109B2 (en) 2021-09-17 2025-04-15 Kabushiki Kaisha Toshiba Etching apparatus and etching method

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